Impact of RCA clean on hafnium dielectrics

ORAL

Abstract

In order to improve the quality of hafnium dielectrics the issue of oxygen vacancies needs to be addressed. The goal of this experiment is to create a model of oxygen incorporation using RCA cleaning. We will present preliminary results of the impact of RCA clean on oxygen levels at the interface of HfO2 films on Si and also HfSiO films on Si. Analysis was completed using x-ray photo spectroscopy (XPS) and Fourier transform infrared spectroscopy (FTIR) under the guidance of engineers at SEMATECH and the Advanced Technology Development Facility (ATDF). Future goals and variations of the ongoing experiment will be discussed as well as the use of Hf in future production of MOSFETs.

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Authors

  • Kevin Boos

    Angelo State University, Texas State University, San Marcos, SEMATECH, Texas State University, University of Texas at Brownsville, Abilene Christian University, Texas Tech University, University of Texas at Austin, Maypearl High School, Birdville ISD, South Texas Chapter, Health Physics Society, Sam Houston State University, NASA Johnson Space Center, Dept. of Physics, U. de Buenos Aires, Argentina, Dept.of Physics, ESFM-IPN, Mexico City, University of Texas M.D. Anderson Cancer Center, Rutgers University, Texas A\&M University, Istanbul University, University of North Texas, University of Texas at El Paso, Texas Christian University, Lee College, Southern University and A\&M College, Austin Community College, Rapoport Academy, Texas A\&M University, Kingsville, The University of Texas at Arlington, Tyler Junior College, Tarleton State University, Tolar High School, Granbury High School, Lake Highlands High School

  • Kevin Boos

    Angelo State University, Texas State University, San Marcos, SEMATECH, Texas State University, University of Texas at Brownsville, Abilene Christian University, Texas Tech University, University of Texas at Austin, Maypearl High School, Birdville ISD, South Texas Chapter, Health Physics Society, Sam Houston State University, NASA Johnson Space Center, Dept. of Physics, U. de Buenos Aires, Argentina, Dept.of Physics, ESFM-IPN, Mexico City, University of Texas M.D. Anderson Cancer Center, Rutgers University, Texas A\&M University, Istanbul University, University of North Texas, University of Texas at El Paso, Texas Christian University, Lee College, Southern University and A\&M College, Austin Community College, Rapoport Academy, Texas A\&M University, Kingsville, The University of Texas at Arlington, Tyler Junior College, Tarleton State University, Tolar High School, Granbury High School, Lake Highlands High School

  • Kevin Boos

    Angelo State University, Texas State University, San Marcos, SEMATECH, Texas State University, University of Texas at Brownsville, Abilene Christian University, Texas Tech University, University of Texas at Austin, Maypearl High School, Birdville ISD, South Texas Chapter, Health Physics Society, Sam Houston State University, NASA Johnson Space Center, Dept. of Physics, U. de Buenos Aires, Argentina, Dept.of Physics, ESFM-IPN, Mexico City, University of Texas M.D. Anderson Cancer Center, Rutgers University, Texas A\&M University, Istanbul University, University of North Texas, University of Texas at El Paso, Texas Christian University, Lee College, Southern University and A\&M College, Austin Community College, Rapoport Academy, Texas A\&M University, Kingsville, The University of Texas at Arlington, Tyler Junior College, Tarleton State University, Tolar High School, Granbury High School, Lake Highlands High School