Neutral Atom Lithography Using a Bright Metastable Helium Beam

POSTER

Abstract

We have performed neutral atom lithography using a beam of metastable 2$\,^3$S Helium (He*) that is brightened sequentially by the bichromatic force and then optical molasses\footnote{M. Partlow et al., Phys. Rev. Lett {\bf 93}, 213004 (2004).}. We have successfully demonstrated this technique using a physical mask of fine mesh covering a self assembled monolayer (SAM) of nonanethiol over a 20 nm evaporated film of Au on a Si wafer substrate\footnote{Younan Xia et al. Chem. Mater. {\bf 7}, 2332 (1995)}. The 20 eV internal energy of He* damages the SAM so that those damaged molecules and the underlying Au layer can be removed using a wet chemical etch$^5$. Samples created this way have an edge resolution of $\sim \,$63 nm that we measured with an atomic force microscope. This technique has promise for creating nano-structured meta-materials with unusual optical properties.

Authors

  • Student Workshop

    Physics, Stony Brook University, NY 11794-3800 USA, Physics Department, Western Michigan University, Kalamazoo, MI, 49008, USA, Advanced Light Source, Lawrence Berkeley National Laboratory, Berkeley, CA, 94720, USA, University of Pittsburgh, Pittsburgh, PA 15260, USA, R. Bo\v{s}kovi\'{c} Institute, Zagreb, Croatia, Bose Institute, Kolkata, India, U. Wisconsin, Argonne National Laboratory, U. Kentucky, Kansas State University, Rice University, Oak Ridge National Laboratory, University of Tennessee, Vienna University of Technology, University of Tennessee, Vienna University of Technology, University of North Alabama, Florence, AL, University of Connecticut, LANL, Auburn University, Voronezh State University, Russia, Oak Ridge National Laboratory, Rollins College, ATOMKI, Debrecen, GANIL, Caen, Stony Brook University, NY 11794-3800 USA, Hefei National Lab \& Dept of Chemical physics, Univ of Sci \& Tech of China, Dept of Earth \& Environ Sci, Univ of Illinois at Chicago, EFI \& Dept of Geophys. Sci., UofC, Chem Div, ANL, Phys Div, ANL, Phys Div, Argonne National Lab (ANL) \& Enrico Fermi Institute (EFI), Univ of Chicago (UofC), Department of Physics, University of Turku, 20014 Turku, Finland, Clarendon Laboratory, Oxford, SNL, Univ. Paris Sud, Orsay

  • Student Workshop

    Physics, Stony Brook University, NY 11794-3800 USA, Physics Department, Western Michigan University, Kalamazoo, MI, 49008, USA, Advanced Light Source, Lawrence Berkeley National Laboratory, Berkeley, CA, 94720, USA, University of Pittsburgh, Pittsburgh, PA 15260, USA, R. Bo\v{s}kovi\'{c} Institute, Zagreb, Croatia, Bose Institute, Kolkata, India, U. Wisconsin, Argonne National Laboratory, U. Kentucky, Kansas State University, Rice University, Oak Ridge National Laboratory, University of Tennessee, Vienna University of Technology, University of Tennessee, Vienna University of Technology, University of North Alabama, Florence, AL, University of Connecticut, LANL, Auburn University, Voronezh State University, Russia, Oak Ridge National Laboratory, Rollins College, ATOMKI, Debrecen, GANIL, Caen, Stony Brook University, NY 11794-3800 USA, Hefei National Lab \& Dept of Chemical physics, Univ of Sci \& Tech of China, Dept of Earth \& Environ Sci, Univ of Illinois at Chicago, EFI \& Dept of Geophys. Sci., UofC, Chem Div, ANL, Phys Div, ANL, Phys Div, Argonne National Lab (ANL) \& Enrico Fermi Institute (EFI), Univ of Chicago (UofC), Department of Physics, University of Turku, 20014 Turku, Finland, Clarendon Laboratory, Oxford, SNL, Univ. Paris Sud, Orsay

  • Student Workshop

    Physics, Stony Brook University, NY 11794-3800 USA, Physics Department, Western Michigan University, Kalamazoo, MI, 49008, USA, Advanced Light Source, Lawrence Berkeley National Laboratory, Berkeley, CA, 94720, USA, University of Pittsburgh, Pittsburgh, PA 15260, USA, R. Bo\v{s}kovi\'{c} Institute, Zagreb, Croatia, Bose Institute, Kolkata, India, U. Wisconsin, Argonne National Laboratory, U. Kentucky, Kansas State University, Rice University, Oak Ridge National Laboratory, University of Tennessee, Vienna University of Technology, University of Tennessee, Vienna University of Technology, University of North Alabama, Florence, AL, University of Connecticut, LANL, Auburn University, Voronezh State University, Russia, Oak Ridge National Laboratory, Rollins College, ATOMKI, Debrecen, GANIL, Caen, Stony Brook University, NY 11794-3800 USA, Hefei National Lab \& Dept of Chemical physics, Univ of Sci \& Tech of China, Dept of Earth \& Environ Sci, Univ of Illinois at Chicago, EFI \& Dept of Geophys. Sci., UofC, Chem Div, ANL, Phys Div, ANL, Phys Div, Argonne National Lab (ANL) \& Enrico Fermi Institute (EFI), Univ of Chicago (UofC), Department of Physics, University of Turku, 20014 Turku, Finland, Clarendon Laboratory, Oxford, SNL, Univ. Paris Sud, Orsay

  • Student Workshop

    Physics, Stony Brook University, NY 11794-3800 USA, Physics Department, Western Michigan University, Kalamazoo, MI, 49008, USA, Advanced Light Source, Lawrence Berkeley National Laboratory, Berkeley, CA, 94720, USA, University of Pittsburgh, Pittsburgh, PA 15260, USA, R. Bo\v{s}kovi\'{c} Institute, Zagreb, Croatia, Bose Institute, Kolkata, India, U. Wisconsin, Argonne National Laboratory, U. Kentucky, Kansas State University, Rice University, Oak Ridge National Laboratory, University of Tennessee, Vienna University of Technology, University of Tennessee, Vienna University of Technology, University of North Alabama, Florence, AL, University of Connecticut, LANL, Auburn University, Voronezh State University, Russia, Oak Ridge National Laboratory, Rollins College, ATOMKI, Debrecen, GANIL, Caen, Stony Brook University, NY 11794-3800 USA, Hefei National Lab \& Dept of Chemical physics, Univ of Sci \& Tech of China, Dept of Earth \& Environ Sci, Univ of Illinois at Chicago, EFI \& Dept of Geophys. Sci., UofC, Chem Div, ANL, Phys Div, ANL, Phys Div, Argonne National Lab (ANL) \& Enrico Fermi Institute (EFI), Univ of Chicago (UofC), Department of Physics, University of Turku, 20014 Turku, Finland, Clarendon Laboratory, Oxford, SNL, Univ. Paris Sud, Orsay

  • Student Workshop

    Physics, Stony Brook University, NY 11794-3800 USA, Physics Department, Western Michigan University, Kalamazoo, MI, 49008, USA, Advanced Light Source, Lawrence Berkeley National Laboratory, Berkeley, CA, 94720, USA, University of Pittsburgh, Pittsburgh, PA 15260, USA, R. Bo\v{s}kovi\'{c} Institute, Zagreb, Croatia, Bose Institute, Kolkata, India, U. Wisconsin, Argonne National Laboratory, U. Kentucky, Kansas State University, Rice University, Oak Ridge National Laboratory, University of Tennessee, Vienna University of Technology, University of Tennessee, Vienna University of Technology, University of North Alabama, Florence, AL, University of Connecticut, LANL, Auburn University, Voronezh State University, Russia, Oak Ridge National Laboratory, Rollins College, ATOMKI, Debrecen, GANIL, Caen, Stony Brook University, NY 11794-3800 USA, Hefei National Lab \& Dept of Chemical physics, Univ of Sci \& Tech of China, Dept of Earth \& Environ Sci, Univ of Illinois at Chicago, EFI \& Dept of Geophys. Sci., UofC, Chem Div, ANL, Phys Div, ANL, Phys Div, Argonne National Lab (ANL) \& Enrico Fermi Institute (EFI), Univ of Chicago (UofC), Department of Physics, University of Turku, 20014 Turku, Finland, Clarendon Laboratory, Oxford, SNL, Univ. Paris Sud, Orsay