Design of a microwave low-temperature plasma reactor used for simulating plasma interactions with mixed materials targets
POSTER
Abstract
Authors
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Guillaume Lombardi
CNRS LIMHP, Universite Paris Nord, 99 Avenue J.-B. Clement F-93430 Villetaneuse, France, LIMHP CNRS
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Ligia Colina Delacqua
CNRS LIMHP, Universite Paris Nord, 99 Avenue J.-B. Clement F-93430 Villetaneuse, France
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Michael Redolfi
CNRS LIMHP, Universite Paris Nord, 99 Avenue J.-B. Clement F-93430 Villetaneuse, France
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Armelle Michau
CNRS LIMHP, Universite Paris Nord, 99 Avenue J.-B. Clement F-93430 Villetaneuse, France, LIMHP CNRS, LIMHP-CNRS (UPR1311)
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Xavier Bonnin
CNRS LIMHP, Universite Paris Nord, 99 Avenue J.-B. Clement F-93430 Villetaneuse, France, LIMHP CNRS
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Dominique Vrel
CNRS LIMHP, Universite Paris Nord, 99 Avenue J.-B. Clement F-93430 Villetaneuse, France
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Khaled Hassouni
CNRS LIMHP, Universite Paris Nord, 99 Avenue J.-B. Clement F-93430 Villetaneuse, France, LIMHP CNRS, LIMHP-CNRS (UPR1311)