Optical measurements of gas temperatures in Ar/CO$_{2}$ arc plasma

POSTER

Abstract

This paper presents an experimental study of the temperatures on DC vertical short free arc in Ar and Ar/CO$_{2}$ mixtures by employing optical interferometry and optical emission spectroscopy. The arc plasma burns between two tungsten vertical electrodes with a gap of 10 mm put in a chamber filled with argon or an argon/carbon dioxide mixture at atmospheric pressure. Two optical windows allow to observe the arc plasma in the chamber. Electrical power is delivered by a DC high voltage (10 kV) with a current intensity chosen from 0,1A up to 0.3 A. By employing optical interferometry, acquired interferograms were treated using Fast Fourier Transform and Abel inversion to obtain the radial distribution of the plasma index refraction. Temperature profiles were then obtained from Gladstone-Dale relation, taking in account the plasma composition versus temperature. The experimental spectrums of the Swan band of C$_{2}$ molecule have been recorded and a code of calculation has been created to simulate molecular spectra of the radical C$_{2}$. Finally rotational temperatures have been determined by comparison between experimental and calculated spectra and then temperature profiles have been obtained and compared with those obtained by optical interferometry.

Authors

  • Nuno Cerqueira

    GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans

  • M. Darnon

    ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials

  • M. Darnon

    ONERA, Pusan Natl Univ, Korea, Kyunghee Univ, Korea, KAIST, Korea, Univ. Grenoble-CNRS, France, Max-Planck-Institute for Extraterrestrial Physics, Max-Planck-Institute for Extraterrestrial Physics, D-85741, Garching, Germany, Ruhr-University Bochum, Hungarian Academy of Science, Department of Physics and Technology, University of Tromso, Norway, Max Planck Institute for Extraterrestrial Physics, Universidade da Madeira, Ioffe Physico-Technical Institute of the Russian Academy of Sciences, Hokkaido University, Japan, Imagineering Inc., Japan, The University of Tokyo, LPP, Ecole Polytechnique, Palaiseau, France, NCPST, Dublin City University, Dublin, Ireland, LPN-CNRS, Marcoussis, France, Faculty of Science and Technology, Meijo University, Faculty of Systems Engineering, Wakayama University, Yamanashi Technology Development Center, Tokyo Electron AT, Ehime Univ., Kyoto Univ., Loughborough University, LPP, Ecole Polytechnique, UPMC, Universit\'e Paris Sud-11, CNRS, Palaiseau, France, Ecole Centrale Paris, EM2C, UPR CNRS 288, France, Departamento de F\'isica, Universidade da Madeira, Largo do Municipio 9000 Funchal, Portugal, Institute for Technology Research and Innovation, Deakin University, NTT-AT Nanofabrication Corporation, Department of Electronic Engineering, Tohoku University, Synchrotron Radiation Research Institute (JASRI)/SPring-8, Nagoya University, Meijo University, Research Center for Photovoltaics-AIST (Japan), NAMRI - University of Ulster (UK), LTM-CNRS, University of Wisconsin-Madison, Centre for Plasma Physics, Queen's University Belfast, UK, Institute of Physics, Belgrade, Serbia, Nagoya University, JST-CREST, Institute of Physics, Nicolaus Copernicus University, Optimare Analytik GmbH \& Co Kg, Universitaet Rostock, Helmholtz Zentrum Muenchen, TU-Muenchen, Physik Department E12, Toshiba Corporate Research \& Development Center, 8 Shinsugita-cho, Isogo-ku, Yokohama, Japan, Nagoya Univ., Tokyo Metropolitan University, University of South Westfalia, Germany, Dept of Mechanical \& Control Engineering, Tokyo Institute of Technology, MESA+ Institute for Nanotechnology, University of Twente, NC State University, Center of Technology for Information Renato Archer, Queen's University of Belfast, Keio University, Sony corp., LPGP, ChIPS/Materia Nova, ChIPS, GREMI/CNRS, GREMI/Universit\'e d'Orl\'eans, Leibniz-Institut fuer Plasmaforschung und Technologie (INP Greifswald e.V.), Departemento de Engenharia Fisica, Faculade de Engenharia, Universidade do Porto, R. Dr. Roberto Frias, 4200-465, Porto, Portugal, INP- Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, NRC Postdoctoral Associate, Naval Research Laboratory, Global Strageies Group, Inc., GREMI, Universite d'Orleans, France, Max-Planck Institute for Extraterrestrial Physics, Ruhr-University Bochum, AEPT, Ruhr-University Bochum, TET, Kyoto Institute of Technology, Plasma Physics Research Center, Science and Research Branch, Islamic Azad University, Tehran, Iran, Physics Department, Science Faculty, Islamic Azad University, Karaj Branch, Karaj, Iran, Institute of Physics and Technology NAS Belarus, Moscow Institute of Physics and Technology, TOYO a-tec, Graduate School of Sci. and Technol., Nagasaki Univ., Dep. of EEE, Nagasaki Univ., Inst. of Electrical Engineering, Slovak Academy of Sciences, Slovakia, Joint Institute for Nuclear Research, 141980 Dubna, Russian Federation, Frei University Berlin, TU Berlin, Queens University Belfast, Birmingham University, UK, Universidad Complutense de Madrid, Institute for Experimental Physics II, Ruhr-Universitaet Bochum, Pusan National University, Korea, Centre for Plasma Physics, Queens University Belfast, UK, LAPLACE (LAboratoire Plasma et Conversion d Energie), CNRS and Universite de Toulouse, NEC Corp., Renasas Electronics Corp., ULVAC Inc., University of Alberta, Edmonton, Canada, AFRL, Wright-Patterson AFB, USA, PPPL, Princeton University, USA, Department of Electrical Engineering, Keio University, 3-14-1 Hiyoshi, Yokohama 223, Japan, Centro Atomico, 8400 S. C. de Bariloche, Rio Negro, Argentina, Cimap, 6 bd du Mal Juin 14050 Caen Cedex France, CAMS, Australian National University, Canberra, DJ College, Baraur, Max-Planck-Institut fuer Kernphysik, retired, JILA, NIST and University of Colorado, Boulder, CO, USA, LAPLACE (LAboratoire PLAsma et Conversion d'Energie), CNRS and Universite de Toulouse, France, California State University, Fullerton, Sophia University, Flinders University, Tokyo University of Science, Photon Factory, Institute of Materials Structure Science, Department of Physics, Sophia University, Department of Chemistry, Tokyo Institute of Technology, Sojo University, Sumitomo Metal Mining Co. Ltd, Kyusyu Institute of Technology, Kyushu University, ULVAC-RIKO, SAGA Light Source, Univ Nantes, CNRS, IMN, France, Masaryk University, Brno, Czech Republic, GREMI, Tokyo Electron Ltd., Kyoto University, Department of Advanced Materials Science, Graduate School of Frontier Sciences, The University of Tokyo, Department of Complexity Science and Engineering, Graduate School of Frontier Sciences, The University of Tokyo, Department of Integrated Biosciences, Graduate School of Frontier Sciences, The University of Tokyo, Seoul National University, Laser and Plasma Research Institute, Shahid Beheshti University, Tehran, Iran, Sasebo National College of Technology, J.V. Jain College, Saharanpur, V.N. Karazin Kharkiv National University, Osaka University, Institute for Molecular Science, Tohoku University, Wakayama university, Kumamoto University, Oita National College of Technology, Kumamoto Universisty, Shizuoka University, Alexandru Ioan Cuza University, (NCPST), (BDI), (Impedans), Ruhr University Bochum, Insitute for Plasma Technology, Germany, Ruhr University Bochum, Insitute for Theoretical Electrical Engineering, Germany, Tokyo City University, University of the Ryukyus, Saga University, Adtec Plasma Tecnology Co.Ltd., Adtec Europe Ltd., Tokai University, University of Rostock, Germany, Academy of Sciences of the Czech Rep., Institute of Physics, Prague, University of Greifswald, Germany, IPFN-LA/IST, Lisboa, Portugal, LPGP/UPS, Orsay, France, National Defense Academy, IRCELYON - UMR 5256 CNRS Universit\'e Lyon1, 69100 Villeurbanne - France, Arkema - CRRA, 69310 Pierre-B\'enite, Research Group Reactive Plasmas, Ruhr-University Bochum, Germany, Department of Experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, The Open University, UK, LPGP CNRS and Univ Paris-Sud, Laplace CNRS and Univ Toulouse, INP Greifswald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Katagiri Engineering Co., LTD., NU Eco Engineering Co., LTD., Wakayama University, National Technical University ``KhPI'', CORIA Universite et INSA de Rouen, Hanyang Univ. Seoul, South Korea, Hanyang University, Bauman Moscow State Technical University, Laboratoire EM2C, Ecole Centrale Paris, Semiconductor R\&D center, Samsung Electronics CO. LTD, SKKU Advanced Institute of Nanotechnology, Sungkyunkwan University, Keldysh Institute of Applied Mathematics RAS, Moscow, Russia, Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia, Departamento de Fisica, Universidad de Cordoba, 14071 Cordoba (Spain), Lab. Phys. Plasmas, Mat. C./A., Univ. Sci./Technol., 31000 Oran (Algeria), Theoretical Electrical Engineering, Ruhr University Bochum, V. N. Karazin Kharkiv National University, Ukraine, Ruhr- University Bochum, Institute for Theoretical Electrical Engineering, D- 44780 Bochum, Germany, IEMN, DAPEM, DEP, West Virginia University, St. Petersburg State Mining Institute (Technical University), Central Institute of Aviation Motors, Tokyo Institute of Technology, Tokai Universtiy, Bluglass Ltd, Australia, The Australian National University, Australia, Macquarie University, Australia, Institute of General and Ecological Chemistry, Technical University of Lodz, Poland, ONERA/ LPP, Shimadzu Corporation, Tokyo Institute of Technology Nanofiber Strategic Research Initiative, Gunma National College of Technology, Institute of Physics of Materials, AS CR, Department of Physical Electronics, Masaryk University, Ruhr-University Bochum, Institute for Plasma Technology, Germany, Ruhr-University Bochum, Workgroup Reactive Plasmas, Department of Applied Science for Electronics and Materials, Kyushu University, Kyushu Synchrotron Light Research Center, Canakkale Onsekiz Mart University Physics Department Canakkale Turkey, Nagasaki University, Department of Materials, Physics and Energy Engineering, Nagoya University / EcoTopia Science Research Institute, Nagoya University, EcoTopia Science Research Institute, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University, Department of Materials, Physics and Energy Engineering, Nagoya University/ EcoTopia Science Research Institute, Nagoya University/ CREST, JST, EcoTopia Science Research Institute, Nagoya University/ CREST, JST, Tech-X Corporation, RF-Plasma Consulting, PPPL, Princeton University, Faculty of Electrical Engineering Belgrade, BluGlass Ltd, Macquarie University, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran, Laser and Plasma Research Institute, Shahid Beheshti University, G.C., Evin, 1983963113, Tehran, Iran., Lublin University of Technology, Lublin University of Technolgy, GREMI UMR 6606 CNRS Universit\'e d'Orl\'eans, INP Greifs\-wald, Felix-Hausdorff-Str.~2, 17489 Greifswald, Germany, Bowers \& Wilkins Ltd, Centre for Energy Studies, Indian Institute of Technology Delhi 110016, India, Old Dominion University, Kisarazu National College of Technology, Chiba Institute of Technology, UNIST, Korea, Toyota Technological Institute, Shonan Plastic Mfg. Co., Ltd., Toho Gas Co., Ltd., Tokai Carbon Co., Ltd., Toyohashi University of Technology, Department of Electrical and Electronic Engineering Kanagawa Institute of Technology, 1030 Shimo-Ogino, Atsugi 243-0292, Japan, Kaluga Branch of Bauman Moscow State Technical University, Bazhenov 2, Kaluga, 248000, Russia, Kochi Univ. Technol., Ehime University, Physics Department, Islamic Azad University, Karaj Branch, Karaj, Iran, Jeju National University, Graduate School of Engineering, Nagoya University, Faculty of systems engineering, Wakayama University, Nagoya Institute of Technology, GREMI UMR6606 CNRS Orleans University France, Laser and Plasma Engineering Institute, Old Dominion University, Institute of Physics, Pregrevica 118, Belgrade, Serbia, Department of experimental Physics, Comenius University, Mlynsk\'a dolina F2, 84248 Bratislava, Slovakia, IPFN-LA/IST Lisboa, Portugal, LATMOS, UVSQ, France, GREMI, Universite d Orleans, France, LATMOS-UVSQ/CNRS, France, GREMI/CNRS, France, IPFN-LA/IST, Portugal, Institute of Nuclear Physics, Moscow State University, Russia, Ruhr University Bochum, Institute for Materials, Ruhr University Bochum, Institute for Plasma Technology, Graduate School of Engineering, Hiroshima University, Digital Appliances Division, Samsung Electronics Co., Ltd. and Samsung Yokohama Research Institute, Graduate School of Engineering, Nagoya Institute of Technology, IPFN/IST, Lisboa, Portugal, LPGP, CNRS/UPS, Orsay, France, Wright-Patterson AFRL, UES, Inc., LPGP-CNRS-UPS, Orsay, France, Suzuka National College of Technology, Kanazawa Institute of Technology, Kyusyu Univ., Osaka Univ., National Institute for Fusion Science, Iranian National Center for Laser Science and Technology (INLC), Tehran, Iran, Physics Department, Science Faculty, Karaj Branch, Islamic Azad University, Karaj, Iran, Chubu University, Department of Earth and Planetary Science, Tokyo Institute of Technology, Laboratoire de Physique des Plasmas, Ecole Polytechnique UMR CNRS 7648, 91120 Palaiseau, France, Plasma Physics Research Center, Science and Research Campus, Islamic Azad University, Tehran, Iran, VSEA, Kaunas University of Technology, Chung-Nam National University, Electronics and Telecommunications Research Institute, Mitsubishi Heavy Industries Ltd., Globalfoundries Dresden Module Two GmbH \& Co. KG, Wilschdorfer Landstr. 101, 01109 Dresden, Germany, Fraunhofer ENAS, Technologie-Campus 3, 09126 Chemnitz, Germany, Leibniz Institute for Plasma Science and Technology, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, Centre for Plasma Physics, Queen's University Belfast, Northern Ireland, Physics Department, Wesleyan University, Middletown, CT USA, ELTRO GmbH, Arnold-Sommerfeld-Ring 3, 52499 Baesweiler, Germany, Institute of Atomic Physics and Spectroscopy, Department of Physics and Astronomy, University of Iowa, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands, UES, inc, PPPL, AFRL, Japan Aerospace Exploration Agency, $^1$INP Greifswald, F.-Hausdorff-Str. 2, 17489 Greifswald, Germany, $^2$ St.Petersburg State University, Ulyanovskaya 1, 198504 St. Petersburg, Russia, NHK Science and Technology Research Laboratories, LPN-CNRS, LPN, LPP, Solar Energy Group , LG Electronics Advanced Research Institute, EM2C, UPR CNRS 288, Ecole Centrale Paris, Grande voie des vignes, 92295 Chatenay-Malabry Cedex, France, Dep. od EEE, Nagasaki Univ., Institute for Spectroscopy RAS, Troitsk, Nuclear Physics Institute, Moscow State University, CNRS-LPN, CNRS-LTM, Applied Materials