Mass analysis of trifluoro-iodo-methane in a Surface Barrier Discharge

POSTER

Abstract

Surface barrier discharges operated at atmospheric pressure are effective chemical reactors. Mass analysis of the reaction products is possible using suitable high pressure mass spectrometer systems. As an example of the behaviour of simple surface barrier reactor (SBDs), experiments on the decomposition of CF3I are described in which the output from the reactor is admitted via a capillary inlet system into a Hiden HPR20 mass spectrometer. The discharge was operated using helium as the carrier gas. The observed mass spectra are discussed in terms of the plasma dissociation and the subsequent ionisation of the dissociated products in the electron impact ionisation source of the mass spectrometer. When oxygen was added to the gas mixture in the SBD, CFxO species were generated in the plasma. Their influence on the observed mass spectra is shown. The results demonstrate aspects of the capabilities of SBDs for dissociating halocarbon gases at atmospheric pressure and the possibilities of direct mass spectrometric monitoring of such processes.

Authors

  • J.A. Rees

    Hiden Analytical

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • Igor Kaganovich and Yevgeny Raitses, Princeton Plasma Physics Lab

    MIT, University of Texas at Austin, Kyoto University, Princeton University, Lockheed Martin, LAPLACE and Universite Paul Sabatier, Chubu Univ., Hiden Analytical, GoLP/Instituto de Plasmas e Fus\~ao Nuclear, Instituto Superior T\'ecnico, Lisbon, Portugal, Novellus Systems, Inc., Institute of Physics, University of Belgrade, Serbia, Faculty of Electrical Engineering, University of Belgrade, Serbia, Jozef Stefan Institute, Ljubljana, Slovenia, Department of Electrical Engineering, Hanyang University, LPGP, CNRS and Univ Paris Sud, Univ Liverpool, LAPLACE, CNRS and Univ Toulouse, Drake Univ, JILA, NIST and Univ Colorado, Kinema Software, IPFN/IST-UTL Lisbon, IPFN/IST-UTL, Lisbon, Portugal, York Plasma Institute, Department of Physics, University of York, York YO10 5DD, UK, Centre for Plasma Physics, School of Mathematics and Physics, Queens University Belfast, Northern Ireland, UK, Centre for Plasma Physics, Queens University of Belfast, Brno University of Technology, Ruhr-University Bochum, Hungarian Academy of Sciences, Dalian University of Technology, China, Max Planck Institute for Extraterrestrial Physics, Germany, Department of Electrical Engineering, Hanyang University, Republic of Korea, University of Houston, Houston, TX, Princeton Plasma Physics Laboratory, Princeton, NJ, University of Iceland, Center for Antimatter-Matter Studies, Australian National University, Centre for Antimatter-Matter Studies, University of Adelaide, Max Planck Institute for Nuclear Physics, Max Planck Institute for Nuclear Physics, Heidelberg, Germany, National Fusion Research Institute, Toho Gas Co., Ltd., Shonan Plastic Mfg. Co., Ltd., Tokai Carbon, Co., Ltd., Toyohashi University of Technology, CAMS, Australian National University, CAMS, Flinders University, Australia, CAMS, James Cook University, Australia, CSIC, Madrid, Spain, Institute of Physics, Belgrade, Serbia, Tech-X Corporation, Kyushu University, Saga University, Charles University, Prague, The University of Tokyo, ISAE, Toulouse, FR, LAPLACE, Univ Toulouse, Polytech Orleans, ZEON CORPORATION, Nagoya University, Applied Materials Inc., Varian Semiconductor Equipment Associates, 35 Dory Road, Gloucester, Massachusetts 01930, Hungarian Academy of Sciences, Budapest, Hungary, Ruhr University, Bochum, Germany, Dublin City University, Ireland, Max-Planck-Institut f\"ur extraterrestrische Physik, Imec, Lam Research Corp., U. Houston, Michigan State University, East Lansing, MI 48824, UC Berkeley, Berkeley, CA 94720, Graduate School of Frontier Sciences, The University of Tokyo, School of Fundamental Studies, Shanghai Univ. of Engineering Science, Tsinghua University, University of Manchester, Missouri S and T, Chungnam National University, University of California, San Diego, Institute of Atmospheric Optics, Siberian Branch of Russian Academy of Sciences, Lebedev Physical Institute of Russian Academy of Sciences, IREAP, University of Maryland, Department of Physics and Astronomy, Mississippi State University, MS, Department of Mechanical and Aerospace Engineering, The George Washington University, Washington State University, Surface Engineering Laboratory, Laval University, Quebec, Canada, LAPLACE, Paul Sabatier University, Toulouse, France, CASPER - Baylor University, CASPER - Baylor University / IRS University of Stuttgart, Department of Physics and Astronomy, Macquarie University, Sydney, NSW, Australia, Sofia University, LAPLACE, CNRS and University of Toulouse, University of Sofia, Bulgaria, LAPLACE, CNRS and Universite de Toulouse, France, Caltech Physical Chemistry, Pasadena, California 91125, LPP, CNRS-Ecole Polytechnique, Electrical Engineering, Hanyang University, Korea, Applied Materials, Inc., University of Michigan, University of Liverpool, Princeton Plasma Physics Laboratory, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville 4810, Australia, Theoretical Division, Los Alamos National Laboratory, Auburn University, Los Alamos National Laboratory, Institute of Modern Physics, Chinese Academy of Sciences, Lanzhou, China, Hokkaido University, Japan, Nagoya University, Japan, Hanyang University, Dept. Appl. Phys., NDA, Hokkaido Univ., Muroran Institute of Technology, AFRL, Kyoto Univ., UES Inc./AFRL, Osaka University, ESI US R\&D Inc, LATMOS-UVSQ/ CNRS, France, GREMI/CNRS, France, IPFN/IST-UTL, Portugal, The Open University, UK, LSGS/CNRS, France, LPGP-UPS/CNRS, France, SCPT, Svobody sq.6, Kharkov, 61022, Ukraine, SCPT, Svobody sq.6, Kharkov 61022, Ukraine, Scientific Center of Physical Technologies, Svobody sq.6, Kharkov 61022, Ukraine, Agilent Technologies, Laboratoire de Spectrometrie Physique, University Joseph Fourier and CNRS, Grenoble, France, Centre for Plasma Physics, School of Mathematics and Physics, Queen's University Belfast, Northern Ireland, UK, DEM/IST-UTL, Portugal, School of Physics and Optoelectronic Technology, Dalian University of Technology, Dalian 116024, China, Hungarian Academy of Science, Henderson State University, Air Products, Pusan National University, Department of Electrical and Electronic Engineering, Tokyo Institute of Technology, Meijo University, Wakayama University, Hewlett-Packard Res. Labs, Laser and Plasma Engineering Institute, Old Dominion University, Norfolk,Virginia 23529, USA, Laboratoire de Physique des Gaz et des Plasmas CNRS and Univ. Paris Sud, Orsay, France, Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, Leibniz Institute for Plasma Science and Technology (INP) Greifswald, York Plasma Institute, Department of Physics, University of York, UK, Biomolecular Sciences Group, School of Pharmacy, Queen's University, Belfast, United Kingdom, Nagoya Univ., Meijo Univ., Drexel University, Univerity of York, Dept Appl Phys, Donghua U, Shanghai 201620, China, ENS, Cachan, UPMC, France, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, 91128 Palaiseau, France, Dept EECS-1770, Univ Calif, Berkeley CA 94720, ITAM SB RAS, PPPL, WVU, SPbMTU, AFOSR, retired, Tokyo Electron America, St. Petersburg State Mining University, David Graves, UC Berkeley, and Gottlieb Oehrlein, University of Maryland

  • J.A. Rees

    Hiden Analytical