In-situ Monitoring of Surface Modification of GaN Films Exposed to Inductively-Coupled Plasmas

POSTER

Abstract

This paper reports in-situ monitoring of surface modification of plasma-treated GaN films based on photoluminescence (PL) technique. Irradiation of 313 nm ultraviolet (UV) light induced the photoluminescence of the GaN film, which typically consists of ~365 nm luminescence caused by transition between near band edges (NBE) andbroad yellow luminescence (YL) for an approximate wavelength range of 480-700 nm corresponding to defect-states-related transition before plasma exposure. However, after turning on discharges, a broad blue luminescence (BL) of 400-480 nm was also observed, and the BL intensity significantly increased, whereas the NBE and the YL decreased after the plasma exposure. The plasma-induced significant nitrogen deficiency near top surface will cause the decreases in both the NBE and the YL as non-emissive defects, and diffusion of the defects in the depth direction will attribute to the appearance of the BL. These results suggested that the PL measurements is useful for in-situ surface monitoring of plasma-treated GaN films. This work is partly supported by the 2nd stage Knowledge Cluster Initiative and Grant-in-Aid for Scientific Research (C) from the Ministry of Education, Culture, Sports, Science and Technology of Japan.

Authors

  • Keiji Nakamura

    Chubu University

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans

  • Laura Brull\'e

    Ruhr-University Bochum, Nagoya University, Meijo University, EMD Corporation, Joining and Welding Research Institute, Osaka University, Science Institute, University of Iceland, Uppsala University, Sweden, ZIK plasmatis at the INP Greifswald e.V., INP Greifswald e.V., Saint-Petersburg State University Institute of Physics, INP Greifswald, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, CNRS, The University of Tokyo, The Australian National University, University of York, Laser-Plasma Research Institute, Shahid Beheshti University, Evin, 1983963113, Tehran, Iran, Department of Nanobiotechnology, Faculty of Biological Sciences, Tarbiat Modares University, Tehran, Iran, Department and Research Institute of Dental Biomaterials and Bioengineering, College of Dentistry, Yonsei University, Republic of Kore, Plasma Bioscience Research Center, Kwangwoon University, Republic of Korea, Hokkaido University, plasmatis at INP Greifswald e.V., Indiana University, Department of Chemistry, USA, University of M\"unster, Institute of Inorganic and Analytical Chemistry, Germany, Leibniz Institute for Solid State and Materials Research (IFW) Dresden, Germany, Department of Electrical Eng., Computer Sci., Nagoya University, Ad Astra Rocket Company, Institute for Plasma Research, Gandhinagar, India, Tokyo Institute of Technology, Institute for Strategic and Innovative Technologies, Austin, TX, Georgia Institute of Technology, Sandia National Laboratories, Princeton Plasma Physics Laboratory, Tokyo Electron Technology Center America, Tokyo Electron America, University of Alberta, University of California, San Diego, CAMS, Australian National University, Canberra, Laser-Plasma Research Institute of Shahid Beheshti University, Evin 1983963113, Tehran, Iran, JILA, NIST and Univ Colorado, USA, SRC TRINITI, Russia, Inst of Space and Astronautical Sci, Japan, Univ Liverpool, UK, LAPLACE, CNRS and Univ Toulouse, France, IPFN/IST-UTL Lisbon, Portugal, Stanford University, Center for Accelerator Science, Old Dominion University, Ruhr University Bochum, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Kyushu University, University of Michigan - Ann Arbor, Universidad de C\'ordoba, Spain, Queens University Belfast, Wesleyan University, LSGS/CNRS, France, IPFN/IST-UTL, Portugal, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, University of Southern California, LAPLACE, Universite de Toulouse, Open University UK, Kharkov National University, Svobody Sq.4, Kharkov 61022, Ukraine, LPP, Ecole Polytechnique, UPMC, Universit{\'e} Paris Sud-11, CNRS, 91128 Palaiseau Cedex, France, INP Greifs\-wald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, Department of Aeronautics and Astronautics, Kyoto University, Japan, Institute of Physics Belgrade, DPHE, Centre Universitaire J.F. Champollion, Albi, France, LAPLACE, CNRS and Univ. Toulouse, France, UC Berkeley, Department of Nano-scale Semiconductor Engineering, Hanyang University, Seoul, Korea, Applied Materials Inc., Varian Semiconductor Equipment Business Unit, 35 Dory Road, Gloucester, MA 01939 USA, Department of Physics, University of Wisconsin-Madison, Department of Electrical and Computer Engineering, University of Wisconsin-Madison, Department of Electrical Engineering, Hanyang University, Deparment of Physics, University of Wisconsin-Madison, Department of Biomedical Engineering, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Obstetrics and Gynecology, Tokai University, Kanagawa, 259-1193, Japan, Nano Carbon Bio Device Research Center, Tokyo City University, Tokyo, 158-8557, Japan, Department of Biomedical Engineering, Tokyo City University, Tokyo, 158-8557, Japan, The University of Texas at Austin, SAIREM SAS, 12 Porte du Grand Lyon, 01702 Neyron, Cedex France, LPP, Ecole Polytechnique, UPMC, Universite Paris Sud, The University of Texas at Dallas, Chubu University, Institute of Physics, Pregrevica 118, 11080 Belgrade, Serbia, Facult\'e des Sciences, Universit\'e Libre de Bruxelles, 1050 Brussels, Belgium, ARC Centre for Antimatter-Matter Studies, James Cook University, Townsville, Australia, Dept. Engineering Physics, University of Wisconsin, Madison, Madison WI 53706, Dept. of Physics, University of San Diego, San Diego, CA, 92110, SPbSU, WVU, AFRL, Chiba Institute of Technology, Old Dominion University, University of Houston, NU-ECO Engineering co. ltd., University of Michigan, Taras Shevchenko National University of Kyiv, National Technical University of Ukraine ``Kyiv Polytechnic Institute'', Odessa National Universiy, EIIRIS, Toyohashi Univ. of Technol., Dept. of Electrical and Electronic Information Eng., Toyohashi Univ. of Technol., Department of Biomedical Engineering and Nano Carbon Bio Device Research Center, Tokyo City University, Department of Biomedical Engineering, Tokyo City University, Nagoya Institute of Technology, Kyusyu University, Osaka University, GPPMM/XLIM, CNRS-UNILIM, France, LPGP-UPS/CNRS, France, CAMS, Australian National University, Canberra, Australia, CAMS, James Cook University, Townsville, Australia, CAMS, Flinders University, Adelaide, Australia, University of North Texas, Denton, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Missouri University of Science and Technology, University of the Sunshine Coast, ARC Centre of Excellence for Antimatter-Matter Studies, Queen's University Belfast, University of Mosul, Charles University, Prague, Czech Republic, ICARE - CNRS, Orleans, France, Dept. of Engineering Physics, University of Wisconsin, Madison, Wisconsin 53706, Missouri University of Science and Technology - Rolla, Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University, Department of Energy Systems Engineering, Seoul National University, University of Wisconsin - Madison, CFDRC, Australian National University, Max-Planck-Institut fur Kernphysik, Henderson State University, Max-Planck-Institute for Nuclear Physics, Heidelberg, Germany, University of South Florida, SENTECH Instruments GmbH, Berlin, Germany, Ferdinand-Braun-Institut, Berlin, Germany, General Electrical Engineering and Plasma Technology, Ruhr-University Bochum, D-44780 Bochum, Germany, Theoretical Electrical Engineering, Ruhr University Bochum, D-44780 Bochum, Germany, Eckerd College, Department of Electrical and Computer Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, School of Material Science and Engineering, Center for Optical Materials Science and Engineering Technologies, Clemson University, York Plasma Institute, Department of Physics, University of York, York, YO10 5DQ, UK, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, LPP, CNRS, Ecole Polytechnique, UPMC, Paris XI, LSPM, CNRS UPR 3407, Universit\'e Paris 13, Applied Materials, Inc., Department of Advanced Materials Science, The University of Tokyo, 5-1-5 Kashiwanoha, Kashiwa, Chiba 277-8561 Japan, Hungarian Academy of Sciences, Mechatronics and Manufacturing Technology Center, Samsung Electronics Co. Ltd., University of Wisconsin Madison, INP Greifswald, Greifswald, Germany, Leibniz University Hannover, Lockheed Martin Aeronautics Company, Lam Research Corporation, DBCR University of Science and Technology, Murthal -131039, India, Department of Physics, Indian Institute of Technology Delhi, New Delhi - 110016, India, Centre for Energy Studies, Indian Institute of Technology Delhi, New Delhi - 110016, India, IMEC, Leuven, Belgium, Skobeltsyn Institute of Nuclear Physics, Moscow State University, Moscow, Russia, University of Antwerp, imec Belgium, Hungarian Academy of Sciences, Hungary, Ruhr University Bochum, Germany, Tokyo Electron Ltd, U.S.A., UCLA, University of Saskatchewan, RF Plasma Consulting, Brookline, Massachusetts 02446, USA, Laboratoire de Physique des Plasma (LPP), Ecole Polytechnique/CNRS, Route de Saclay, 91128 Palaiseau, France, LAPLACE, CNRS and Univ Toulouse, GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans, TAAM-CIPA UPS44 CNRS Orl\'eans and GREMI UMR7344 CNRS/Universit\'e d'Orl\'eans