Poster Session I (17:30-19:30)

Poster Session I (17:30-19:30)

POSTER · GT1

Presiders

Role: CHAIR

John Verboncoeur

Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University

Presentations

Air mode waveguide cavity with hybrid tunable plasma switching elements for K-band microwaves

POSTER
Authors
- Benjamin Wang
  
  Stanford University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
View abstract →
Difference in Rotational Temperatures between Neutral Molecules and Molecular Ions of Low-Pressure Discharge N2-O2 Plasmas

POSTER
Authors
- Hiroshi Akatsuka
  
  Tokyo Institute of Technology
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- Koichi Naoi
  
  Tokyo Institute of Technology
- Hao Tan
  
  Tokyo Institute of Technology
- Atsushi Nezu
  
  Tokyo Institute of Technology
- Haruaki Matsuura
  
  Tokyo Institute of Technology
View abstract →
Global Model of a Fast Ionization Wave in Helium

POSTER
Authors
- Benjamin Yee
  
  Sandia National Laboratories
- Edward Barnat
  
  Sandia National Laboratories
- John Foster
  
  University of Michigan
View abstract →
Modeling the impact of magnetic field on plasma parameters in an electron beam generated argon plasma

POSTER
Authors
- George Petrov
  
  Naval Research Laboratory, Naval Research Lasboratory
- David Boris
  
  Naval Research Lasboratory, Naval Research Laboratory
- Tzvetelina Petrova
  
  Naval Research Lasboratory, Naval Research Laboratory
- Scott Walton
  
  Naval Research Lasboratory, NRL, Naval Research Laboratory
View abstract →
Controlling the Electron Energy Distribution Function Using an Anode

POSTER
Authors
- Scott D. Baalrud
  
  Department of Physics, University of Iowa, University of Iowa, Department of Physics and Astronomy, University of Iowa
- Edward Barnat
  
  Sandia National Laboratories, Sandia Nat'l Labs, Sandia National Laboratory
- Matt Hopkins
  
  Sandia National Laboratories, Sandia National Laboratory
View abstract →
Effect of mass and charge of ionic species on spatio-temporal evolution of transient electric field in CCP discharges

POSTER
Authors
- Sarveshwar Sharma
  
  Institute for Plasma Research, Bhat, Gandhinagar, Gujarat, India
- Sanjay Kumar Mishra
  
  Institute for Plasma Research, Bhat, Gandhinagar, Gujarat, India, Institute for Plasma Research, Bhat Gandhinagar, Gujarat, India
- Predhiman Kaw
  
  Institute for Plasma Research, Bhat, Gandhinagar, Gujarat, India
- Miles Turner
  
  Dublin City University, Galsnevin, Dublin 9, Ireland, National Center for Plasma Science Technology, Dublin City University, Dublin City University
- Shantanu Kumar Karkari
  
  Institute for Plasma Research, Bhat, Gandhinagar, Gujarat, India
View abstract →
Tuning of Electron Energy and Density in a Double-Pulsed Argon Plasma

POSTER
Authors
- Ricky Tang
  
  Sandia National Laboratories
- Edward Barnat
  
  Sandia National Laboratories, Sandia Nat'l Labs, Sandia National Laboratory
- Paul Miller
  
  Sandia National Laboratories
View abstract →
Controlling plasma properties in a dc discharge with two anodes and a cold cathode

POSTER
Authors
- Vladimir Demidov
  
  WVU and SPbGU
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
View abstract →
Experimental study of low-temperature plasma transport across a magnetic filter

POSTER
Authors
- Romain Baude
  
  LAPLACE, CNRS and University of Toulouse
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
View abstract →
Breakdown in vapors of alcohols: methanol and ethanol

POSTER
Authors
- Zoran Lj. Petrovic
  
  Institute of Physics, University of Belgrade, Institute of Physics, University of Belgrade, P.O. Box 68, 11080 Belgrade, Serbia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade
- Jelena Sivos
  
  Institute of Physics, University of Belgrade
- Nikola Skoro
  
  Institute of Physics, University of Belgrade
- Dragana Maric
  
  Institute of Physics, University of Belgrade
- Gordana Malovic
  
  Institute of Physics, University of Belgrade
View abstract →
Electron heating due to coulomb collisions between slow and intermediate electrons in DC glow discharges

POSTER
Authors
- Stepan Eliseev
  
  Saint Petersburg State University
- Anatoliy Kudryavtsev
  
  Saint Petersburg State University
View abstract →
Investigation of power dependence of electron density for various pressures

POSTER
Authors
- June Young Kim
  
  Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- Chin-Wook Chung
  
  Hanyang University, Department of Electrical Engineering, Hanyang University, Hanyang Univ., Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea
View abstract →
DBCC Software as Database for Collisional Cross-Sections

POSTER
Authors
- Daniel Moroz
  
  University of Pennsylvania
- Paul Moroz
  
  Tokyo Electron U.S. Holdings, Inc.
View abstract →
Anode Sheath and Double Layer Solutions with Ionization

POSTER
Authors
- Brett S. Scheiner
  
  Department of Physics and Astronomy, University of Iowa
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
View abstract →
Does the Bohm Criterion have meaning for collisional plasmas?

POSTER
Authors
- Greg Severn
  
  University of San Diego, Department of Physics
- Chi-Shung Yip
  
  University of Wisconsin-Madison, Department of Engineering Physics
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- Noah Hershkowitz
  
  University of Wisconsin-Madison, Department of Engineering Physics
View abstract →
First steps towards the reaction kinetics of HMDSO in an atmospheric pressure plasma jet in argon

POSTER
Authors
- Detlef Loffhagen
  
  INP Greifswald, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, INP Greifswald, Germany
- Markus M. Becker
  
  INP Greifswald, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany
- R\"udiger Foest
  
  INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany
- Jan Sch\"afer
  
  INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany
- Florian Sigeneger
  
  INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany
View abstract →
Optical emission study of ion composition in an inductively coupled oxygen plasma

POSTER
Authors
- Nathaniel Ly
  
  University of Wisconsin, University of Wisconsin-Madison
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
View abstract →
Kinetic study of the NO formation in pulsed air-like low-pressure dc plasmas: measurement and numerical modelling

POSTER
Authors
- Marko Huebner
  
  INP Greifswald, Germany
- Sergej Gorchakov
  
  INP Greifswald, Germany
- Detlef Loffhagen
  
  INP Greifswald, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, INP Greifswald, Germany
- Olivier Guaitella
  
  LPP, Ecole Polytechnique, France
- Daniil Marinov
  
  Open University, UK
- Antoine Rousseau
  
  LPP, Ecole Polytechnique, France
- Juergen Roepcke
  
  INP Greifswald, Germany
View abstract →
Surface mechanisms during cryogenic etching of silicon with SF$_{6}$/O$_{2}$ inductively coupled plasmas

POSTER
Authors
- Stefan Tinck
  
  University of Antwerp
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
View abstract →
Sum frequency generation spectroscopy of interfacial water molecules influenced by plasma-generated radicals

POSTER
Authors
- Takahiro Kondo
  
  Osaka Univ.
- Tsuyohito Ito
  
  Osaka University, Osaka Univ.
View abstract →
Effects of the Fabrication and Preparation Processes on the SEY of Niobium SRF Cavities

POSTER
Authors
- Milos Basovic
  
  Old Dominion University, CAS
- Ana Samolov
  
  University of Massachusetts Boston
- Svetozar Popovic
  
  Old Dominion University, Old Dominion University, Physics Department, Center for Accelerator Science, Old Dominion University, CAS
- Lepsha Vuskovic
  
  Old Dominion University, Physics Department, Center for Accelerator Science, Old Dominion University, CAS
View abstract →
Laser-induced Fluorescence and Optical Emission Spectroscopy for the Determination of Reactive Species in the Effluent of Atmospheric Pressure Low Temperature Plasma Jets

POSTER
Authors
- Xuekai Pei
  
  HuaZhong University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- Mounir Laroussi
  
  Old Dominion University
View abstract →
Measurement of Gas Temperature in Negative Hydrogen Ion Source by Wavelength-Modulated Laser Absorption Spectroscopy

POSTER
Authors
- S. Nishiyama
  
  Hokkaido University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
View abstract →
Correlating Metastable-Atom Density, Reduced Electric Field, and Electron Energy Distribution in the Early Stages of a 1-Torr Argon Discharge

POSTER
Authors
- J.B. Franek
  
  W Virginia Univ
- S.H. Nogami
  
  W Virginia Univ
- M.E. Koepke
  
  W Virginia Univ
- V.I. Demidov
  
  W Virginia Univ
- Edward Barnat
  
  Sandia National Laboratories, Sandia Nat'l Labs, Sandia National Laboratory
View abstract →
Optical emission diagnostics for plasma parameters in pulse-modulated argon capacitively-coupled discharges

POSTER
Authors
- Nathaniel Ly
  
  University of Wisconsin, University of Wisconsin-Madison
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
View abstract →
Diagnostics of nonlocal plasmas: advanced techniques

POSTER
Authors
- Alexander Mustafaev
  
  National Mineral Resources University, St.-Petersburg, Russia, National University of Mineral Resources ``Mining,'' Department of General and Technical Physics
- Artiom Grabovskiy
  
  National University of Mineral Resources ``Mining,'' Department of General and Technical Physics
- Anastasiya Strakhova
  
  National University of Mineral Resources ``Mining,'' Department of General and Technical Physics
- Vladimir Soukhomlinov
  
  Saint-Petersburg State University, Department of Physics
View abstract →
Radially resolved spectroscopic analysis of positive streamers under transient luminous events conditions

POSTER
Authors
- Vaclav Prukner
  
  Institute of Plasma Physics AS CR, v.v.i., Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague, Czech Republic
- Tomas Hoder
  
  Leibniz Institute for Plasma Science and Technology - INP Greifswald, Felix- Hausdorff-Str. 2, 17489 Greifswald, Germany
- Milan Simek
  
  Institute of Plasma Physics AS CR, v.v.i., Department of Pulse Plasma Systems, Za Slovankou 3, 18200 Prague, Czech Republic
View abstract →
Measuring of the nonlocal EDF of penning electrons by the wall electrode in the plasma afterglow

POSTER
Authors
- Anatoly Kudryavtsev
  
  St. Petersburg State University
- Kirill Kapustin
  
  St. Petersburg State University
- Almaz Sayfutdinov
  
  St. Petersburg State University
View abstract →
Time-resolved measurements of energy distributions for mass-identified ions in low pressure plasmas

POSTER
Authors
- Dave Seymour
  
  Hiden Analytical
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
View abstract →
Analysis of the harmonic currents in floating probes with dielectric films

POSTER
Authors
- Kyung-Hyun Kim
  
  Department of Electrical Engineering, Hanyang University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- Chin-Wook Chung
  
  Hanyang University, Department of Electrical Engineering, Hanyang University, Hanyang Univ., Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea
View abstract →
On harmonic diagnostic method using two frequencies in a floating Langmuir probe

POSTER
Authors
- Dong-Hwan Kim
  
  Hanyang University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
View abstract →
Tunable external RF choke filter design for single Langmuir probe in RF discharges

POSTER
Authors
- SangBum Jeon
  
  Hanyang University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
View abstract →
Experimental investigation of plasma parameter profiles on wafer level with discharge gap lengths in an inductively coupled plasma

POSTER
Authors
- Ju Ho Kim
  
  Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- Chin-Wook Chung
  
  Hanyang University, Department of Electrical Engineering, Hanyang University, Hanyang Univ., Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea
View abstract →
Inductively-coupled plasmas in pure O$_2$: measurements of densities of O atoms, electrons and vibrationally excited Omolecules

POSTER
Authors
- Micka\"el Foucher
  
  LPP-CNRS UMR 7648
- Emile Carbone
  
  CEA grenoble, CEA grnoble
- Jean-Paul Booth
  
  LPP-CNRS UMR 7648
- Pascal Chabert
  
  Laboratoire de Physique des Plasmas, LPP-CNRS UMR 7648
View abstract →
Study on self-bias effect in floating probe using dual frequency

POSTER
Authors
- Il-seo Park
  
  Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
View abstract →
Measurement of the surface charge accumulation using anodic aluminum oxide(AAO) structure in an inductively coupled plasma

POSTER
Authors
- Chin-Wook Chung
  
  Hanyang University, Department of Electrical Engineering, Hanyang University, Hanyang Univ., Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
View abstract →
The effect of rf plasma fluctuation on floating harmonic probes

POSTER
Authors
- Jaewon Lee
  
  Hanyang University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- Chin-Wook Chung
  
  Hanyang University, Department of Electrical Engineering, Hanyang University, Hanyang Univ., Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea
View abstract →
In-situ measurement method of sheath capacitance in plasmas

POSTER
Authors
- Jin-Yong Kim
  
  Hanyang Univ.
- Chin-Wook Chung
  
  Hanyang University, Department of Electrical Engineering, Hanyang University, Hanyang Univ., Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea
View abstract →
Two-photon laser-induced fluorescence imaging of atomic oxygen in an atmospheric pressure plasma jet

POSTER
Authors
- Jacob Schmidt
  
  Spectral Energies, LLC.
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
View abstract →
High sensitivity ultra-broad-band absorption spectroscopy applied to inductively-coupled plasmas in Cl/O

POSTER
Authors
- Micka\"el Foucher
  
  LPP-CNRS UMR 7648
- Emile Carbone
  
  CEA grenoble, CEA grnoble
- Jean-Paul Booth
  
  LPP-CNRS UMR 7648
- Pascal Chabert
  
  Laboratoire de Physique des Plasmas, LPP-CNRS UMR 7648
View abstract →
Hairpin resonator probes with frequency domain boxcar operation for time resolved density measurements in pulsed RF discharges

POSTER
Authors
- David Peterson
  
  North Carolina State University
- Theresa Kummerer
  
  North Carolina State University
- David Coumou
  
  MKS Instruments, MKS Instruments, ENI Power Division, Rochester NY
- Steven Shannon
  
  North Carolina State University
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Experimental Characterization of the Time-Averaged and Oscillatory Behavior of a Hall Plasma Discharge

POSTER
Authors
- Christopher Young
  
  Stanford University
- Andrea Lucca Fabris
  
  Stanford University
- Nicolas Gascon
  
  Stanford University
- Mark Cappelli
  
  Stanford University
View abstract →
Periodic Evolution of a Xe I Population in an Oscillatory Discharge Captured Through Time-Synchronized Laser Induced Fluorescence Techniques

POSTER
Authors
- Andrea Lucca Fabris
  
  Stanford University
- Christopher Young
  
  Stanford University
- Mark Cappelli
  
  Stanford University
View abstract →
Theoretical modeling of laser-induced plasmas using the ATOMIC code

POSTER
Authors
- James Colgan
  
  Theoretical Division, Los Alamos National Laboratory, Los Alamos, New Mexico 87545, USA, Los Alamos National Laboratory
- Heather Johns
  
  Los Alamos National Laboratory
- David Kilcrease
  
  Los Alamos National Laboratory
- Elizabeth Judge
  
  Los Alamos National Laboratory
- James Barefield II
  
  Los Alamos National Laboratory
- Samuel Clegg
  
  Los Alamos National Laboratory
- Kyle Hartig
  
  Los Alamos National Laboratory
View abstract →
RF Models for Plasma-Surface Interactions in VSim

POSTER
Authors
- Thomas G. Jenkins
  
  Tech-X Corporation
- D.N. Smithe
  
  Tech-X Corporation
- A.Y. Pankin
  
  Tech-X Corporation
- C.M. Roark
  
  Tech-X Corporation
- C.D. Zhou
  
  Tech-X Corporation
- P.H. Stoltz
  
  Tech-X Corporation
- S.E. Kruger
  
  Tech-X Corporation
View abstract →
Electrical characteristics and energy budget of dielectric barrier discharges in argon at atmospheric pressure

POSTER
Authors
- Markus M. Becker
  
  INP Greifswald, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
View abstract →
Modeling of filaments and gas flow in an atmospheric pressure plasma jet

POSTER
Authors
- Florian Sigeneger
  
  INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany
- Detlef Loffhagen
  
  INP Greifswald, INP Greifswald, Felix-Hausdorff-Str. 2, 17489 Greifswald, Germany, INP Greifswald, Germany
View abstract →
Fast 2D Fluid-Analytical Simulation of IEDs and Plasma Uniformity in Multi-frequency CCPs

POSTER
Authors
- E. Kawamura
  
  Univ of California - Berkeley
- M.A. Lieberman
  
  Univ of California - Berkeley, Department of Electrical Engineering and Computer Sciences, University of California at Berkeley
- D.B. Graves
  
  University of California at Berkeley, Univ of California - Berkeley
View abstract →
Transport Parameters of $F^{(-)}$ Ions in Mixtures Ar/B$F_3$

POSTER
Authors
- Zeljka Nikitovic
  
  Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade
- Vladimir Stojanovic
  
  Institute of Physics, University of Belgrade, Institute of Physics, University of Belgrade, P.O. Box 68, 11080 Belgrade, Serbia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade
- Zoran Raspopovic
  
  Institute of Physics, University of Belgrade, Institute of Physics, University of Belgrade, P.O. Box 68, 11080 Belgrade, Serbia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade
- Jasmina Jovanovic
  
  Faculty of Mechanical Engineering, University of Belgrade, Faculty of Mechanical Engineering, University of Belgrade, Kraljice Marije 16, 11000 Belgrade, Serbia
- Zoran Lj. Petrovic
  
  Institute of Physics, University of Belgrade, Institute of Physics, University of Belgrade, P.O. Box 68, 11080 Belgrade, Serbia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade
View abstract →
The Influence of Anode Size on Bulk Plasma State: Simulation, Theory, and Experiment

POSTER
Authors
- Matt Hopkins
  
  Sandia National Laboratories, Sandia National Laboratory
- Benjamin Yee
  
  Sandia National Laboratories
- Edward Barnat
  
  Sandia National Laboratories, Sandia Nat'l Labs, Sandia National Laboratory
- Scott D. Baalrud
  
  Department of Physics, University of Iowa, University of Iowa, Department of Physics and Astronomy, University of Iowa
View abstract →
A kinetic electron-neutral collision model for particle-in-cell plasma simulation

POSTER
Authors
- Timothy Pointon
  
  Sandia National Laboratories
- Keith Cartwright
  
  Sandia National Laboratory, Sandia National Laboratories
View abstract →
Numerical simulation of capacitively coupled RF plasma flowing through a tube for the synthesis of silicon nanocrystals

POSTER
Authors
- Romain Le Picard
  
  University of Minnesota
- Sang-Heon Song
  
  University of Michigan
- David Porter
  
  Minnesota Supercomputing Institute
- Mark Kushner
  
  University of Michigan
- Steven Girshick
  
  Dept. of Mechanical Engineering, University of Minnesota, Minneapolis, MN, University of Minnesota
View abstract →
Numerical optimization of collisional cross sections for plasma simulation by Broyden-Fletcher-Goldfarb-Shanno method

POSTER
Authors
- Sang-Young Chung
  
  National Fusion Research Institute
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
View abstract →
Transport Properties of Negative Ions in HBR Plasmas

POSTER
Authors
- Vladimir Stojanovic
  
  Institute of Physics, University of Belgrade, Institute of Physics, University of Belgrade, P.O. Box 68, 11080 Belgrade, Serbia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade
- Nenad Ivanovic
  
  Vinca Institute for Nuclear Science, University of Belgrade, P.O. Box 522, 11000 Belgrade, Serbia
- Marija Radmilovic-Radjenovic
  
  Institute of Physics, University of Belgrade, P.O. Box 68, 11080 Belgrade, Serbia
- Zoran Raspopovic
  
  Institute of Physics, University of Belgrade, Institute of Physics, University of Belgrade, P.O. Box 68, 11080 Belgrade, Serbia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade
- Aleksandar Bojarov
  
  Institute of Physics, University of Belgrade, P.O. Box 68, 11080 Belgrade, Serbia
- Zoran Lj. Petrovic
  
  Institute of Physics, University of Belgrade, Institute of Physics, University of Belgrade, P.O. Box 68, 11080 Belgrade, Serbia, Institute of Physics, University of Belgrade, Pregrevica 118, 11080 Belgrade
View abstract →
Extended dielectric relaxation scheme for fluid transport simulations of high density plasma discharges

POSTER
Authors
- Deuk-Chul Kwon
  
  Natl Fusion Res Inst
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
View abstract →
PLASIMO model of micro-plasma jet for biomedical applications

POSTER
Authors
- Diana Mihailova
  
  Eindhoven University of Technology
- Ana Sobota
  
  Department of Applied Physics, Eindhoven University of Technology, the Netherlands, Eindhoven University of Technology
- Wouter Graef
  
  Eindhoven University of Technology
- Jan van Dijk
  
  Eindhoven University of Technology
- Gerjan Hagelaar
  
  LAPLACE, CNRS and University of Toulouse, CNRS, University of Toulouse
View abstract →
Fluid model of magnetic drifts and instabilities in magnetized low-temperature plasma sources

POSTER
Authors
- Gerjan Hagelaar
  
  LAPLACE, CNRS and University of Toulouse, CNRS, University of Toulouse
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
View abstract →
Propagation of a positive streamer discharge along a dielectric rod

POSTER
Authors
- Anna Dubinova
  
  Centrum Wiskunde \& Informatica
- Ute Ebert
  
  Centrum Wiskunde en Informatica, Amsterdam \& Eindhoven University of Technology, Eindhoven, Centrum Wiskunde \& Informatica
- Jannis Teunissen
  
  Centrum Wiskunde \& Informatica, CWI
View abstract →
Modeling DC-circuit-breakers for long distance electricity transmission

POSTER
Authors
- Ashutosh Agnihotri
  
  Centrum Wiskunde en Informatica, Amsterdam
- Ute Ebert
  
  Centrum Wiskunde en Informatica, Amsterdam \& Eindhoven University of Technology, Eindhoven, Centrum Wiskunde \& Informatica
- Willem Hundsdorfer
  
  Centrum Wiskunde en Informatica, Amsterdam \& Radboud University, Nijmegen
View abstract →
2D streamer simulations using the high order fluid model

POSTER
Authors
- Aram Markosyan
  
  University of Michigan
- Sasha Dujko
  
  University of Belgrade
- Ute Ebert
  
  CWI
View abstract →
Simulating the inception of pulsed discharges around needle electrodes

POSTER
Authors
- Jannis Teunissen
  
  Centrum Wiskunde \& Informatica, The Netherlands
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
View abstract →
Application of ILDM Technique for Simplifying Complex Plasma Chemistry

POSTER
Authors
- Tafizur Rehman
  
  Eindhoven University of Technology
- Kim Peerenboom
  
  Universit\'e libre de Bruxelles, Eindhoven University of Technology
- Efe Kemaneci
  
  Eindhoven University of Technology
- Wouter Graef
  
  Eindhoven University of Technology
- Jan vanDijk
  
  Eindhoven University of Technology
View abstract →
Parametric calculations of plasma jets generated by microdischarges

POSTER
Authors
- M. Foletto
  
  Univ Toulouse
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
View abstract →
A PLASIMO global model for plasma assisted CO$_2$ conversion

POSTER
Authors
- Wouter Graef
  
  Eindhoven University of Technology
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
View abstract →
Magneto-hydrodynamic simulation of hypervelocity neutral plasma jets and their interactions with materials generating extreme conditions

POSTER
Authors
- Vivek Subramaniam
  
  The University of Texas at Austin
- Laxminarayan Raja
  
  The University of Texas at Austin, Univ of Texas, Austin, Dept. of Aerospace Engineering and Engineering Mechanics, The University of Texas at Austin, University of Texas at Austin
- Hariswaran Sitaraman
  
  None
View abstract →
Computational modelling of plasma control using electron injection from electrode surfaces

POSTER
Authors
- Premkumar PanneerChelvam
  
  The University of Texas at Austin
- Laxminarayan Raja
  
  The University of Texas at Austin, Univ of Texas, Austin, Dept. of Aerospace Engineering and Engineering Mechanics, The University of Texas at Austin, University of Texas at Austin
View abstract →
Validation of RF CCP Discharge Model against Experimental Data using PIC Method

POSTER
Authors
- Casey Icenhour
  
  North Carolina State University
- Theresa Kummerer
  
  North Carolina State University
- David L. Green
  
  Oak Ridge National Laboratory
- D.N. Smithe
  
  Tech-X Corporation
- Steven Shannon
  
  North Carolina State University
View abstract →
Particle-In-Cell Simulation and Experimental Characterization of a Cylindrical Cusped Field Plasma Thruster

POSTER
Authors
- Andrea Lucca Fabris
  
  Stanford University
- Christopher Young
  
  Stanford University
- Marco Manente
  
  University of Padova
- Daniele Pavarin
  
  University of Padova, Padova, Italy, University of Padova
- Mark Cappelli
  
  Stanford University
View abstract →
Simulation of Neutral Particle Transport During HiPIMS

POSTER
Authors
- Jan Trieschmann
  
  Institute of Theoretical Electrical Engineering, Ruhr University Bochum
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
View abstract →
Numerical simulation of quantum systems using the Particle-In-Cell method

POSTER
Authors
- Sven Dirkmann
  
  Ruhr University Bochum
- Ziad Youssef
  
  Ruhr University Bochum
- Torben Hemke
  
  Ruhr University Bochum
- Thomas Mussenbrock
  
  Ruhr University Bochum
View abstract →
Simulation of Saddle Coil and Helical Winding Magnetic Field Perturbation in the IR-T1 Tokamak

ORAL
Authors
- Younes Adltalab
  
  Department of Physics, College of Science, Mashhad Branch, Islamic Azad Univesity, Mashhad, Iran
- Pejman Khorshid
  
  Department of Physics, College of Science, Mashhad Branch, Islamic Azad Univesity, Mashhad, Iran
- Elham Abizi Moghadam
  
  Department of Physics, College of Science, Mashhad Branch, Islamic Azad Univesity, Mashhad, Iran
View abstract →
Space -- time evolution of low-pressure H2 plasma induced by runaway photoelectrons produced by KrF laser pulse

ORAL
Authors
- Alexey Zotovich
  
  Moscow State University, Department of Physics, Moscow, Russia
- Andrey Volynets
  
  Moscow State University, Department of Physics, Moscow, Russia
- Dmitry Lopaev
  
  Lomonosov Moscow State University Skobeltsyn Institute of Nuclear Physics, Nuclear Physics Institute, Moscow State University, Moscow, Russia
- Sergey Zyryanov
  
  1 Skobeltsyn Insitute of Nuclear Physics, Moscow State University, SINP MSU, Moscow Russia; 2 Faculty of Physics, Moscow State University, MSU, Moscow, Nuclear Physics Institute, Moscow State University, Moscow, Russia
- Dmitry Astakhov
  
  Institute of Spectroscopy RAS (ISAN), RD ISAN, Troitsk, Russia
- Vladimir Krivtsun
  
  Institute of Spectroscopy RAS (ISAN), RD ISAN, Troitsk, Russia
- Konstantin Koshelev
  
  Institute of Spectroscopy RAS (ISAN), RD ISAN, Troitsk, Russia
View abstract →
Effect of cathode design on dc gas breakdown

POSTER
Authors
- Valeriy Lisovskiy
  
  Kharkov National University, Svobody Sq.4, Kharkov 61022
- Ruslan Osmayev
  
  Kharkov National University, Svobody Sq.4, Kharkov 61022
- Vladimir Yegorenkov
  
  Kharkov National University, Svobody Sq.4, Kharkov 61022
View abstract →
Effect of inter-electrode gap on dc cathode sheath characteristics

POSTER
Authors
- Valeriy Lisovskiy
  
  Kharkov National University, Svobody Sq.4, Kharkov 61022
- Ekaterina Artushenko
  
  Kharkov National University, Svobody Sq.4, Kharkov 61022
- Vladimir Yegorenkov
  
  Kharkov National University, Svobody Sq.4, Kharkov 61022
View abstract →
Investigation of a cylindrical transparent cathode discharge

POSTER
Authors
- Mark Bowden
  
  University of Liverpool
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
View abstract →
Second-harmonic generation in composite of microwave plasma and cm-order metamaterial

POSTER
Authors
- Akinori Iwai
  
  Kyoto University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
View abstract →
Sustenance of electronegative plasma column in the presence of electron temperature gradient in linear magnetized plasma device

POSTER
Authors
- Shantanu Kumar Karkari
  
  Institute for Plasma Research, Bhat Gandhinagar, Gujarat, India
- Mimansa Shastri
  
  Institute for Plasma Research, Bhat Gandhinagar, Gujarat, India
- Hasmukh Kabariya
  
  Institute for Plasma Research, Bhat Gandhinagar, Gujarat, India
- Sanjay Kumar Mishra
  
  Institute for Plasma Research, Bhat, Gandhinagar, Gujarat, India, Institute for Plasma Research, Bhat Gandhinagar, Gujarat, India
- Nishant Sirse
  
  Dublin City University, Ireland
View abstract →
Boundary Conditions and Heat Flux to the Walls in Two-Temperature

ORAL
Authors
- John Verboncoeur
  
  Missouri University of Science and Technology, Los Alamos National Laboratory, Tsinghua University, University of Manchester, Kyoto University, FOM Institute DIFFER, Edisonbaan 14, 3439 MN Nieuwegein, Nagoya University, Tokyo Electron Ltd, Princeton University, The George Washington University, IMEC, The Open University, Oxford Instruments Plasma Technology, UK, York Plasma Institute, University of York, UK, Eindhoven University of Technology, The Netherlands, Institute for Plasma and Atomic Physics, Ruhr-University Bochum, 44780 Bochum, Germany, Department of Physics, West Virginia University, Morgantown, WV 26506, Department of Physics, University of Alberta, Canada, None, Hokkaido University, Kyushu University, Sepuluh Nopember Institute of Technology, University of Saskatchewan, Canada, The Ohio State Univesity, Air Force Research Laboratory, University of California, Berkeley, Aurtas International, Inc., University of Colorado-Boulder, Tokyo Institute of Technology, NU Global, Tokyo Inst of Tech - Tokyo, Meijo University, Hokkaido Univ., National Defense Academy, Dalian University of Technology, Hiden Analytical, Queen's University Belfast, Wesleyan University, CFD Research Corporation, Princeton Plasma Phys Lab, General Electric Research, Niskayuna, NY, Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungarian Academy of Sciences, Budapest, Hungary, Electrical Engineering and Computer Science, U. Michigan, UCLA Department of Physics, Physics Department, Badji Mokhtar University, Annaba, Algeria, Flinders University, James Cook University, Universidad Nacional Aut\'onoma de M\'exico, CNRS and Univ. Toulouse, Drake Univ., Tohoku University, Tokyo Electron Limited, ZIK plasmatis at INP Greifswald, INP Greifswald, ZIK plasmatis at INP Greifswald, TU Eindhoven, Tokyo Metropolitan University, Tokyo Institute of Tech., York Plasma Institute, University of York, Fukuoka University, Charles University Prague, Green Chemistry Centre of Excellence, University of York, Now at the University of Liverpool, Texas A\&M University, The University of Tokyo, National Institute for Fusion Science, Old Dominion University, University of Paul Sabatier, University of Montreal, Institute of Space and Astronautical Science, Japan Aerospace Exploration Agency, The Ohio State University, Victor Technologies, West Lebanon, University of Liverpool, Institute of Theoretical Electrical Engineering, Ruhr University Bochum, Eindhoven University of Technology, CNRS and Univ Toulouse, Centrum Wiskunde \& Informatica and Eindhoven University of Technology, The Netherlands, Tsinghua University, China, LAPLACE, CNRS and University of Toulouse, Natl Fusion Res Inst, National Fusion Research Institute, Spectral Energies, LLC., UES, Inc., Hanyang University, Seoul University, SEMES, Department of Electrical Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul, 133-791, Republic of Korea, Department of Nanoscale Semiconductor Engineering, Hanyang University, Seoul 133-791, South Korea, Department of Electrical Engineering, Hanyang University, Department of Nanoscale Semiconductor Engineering, Hanyang University, University of Wisconsin-Madison, HuaZhong University, University of Antwerp, Universit\'e d'Orleans, Applied Materials, Silicon Systems Group, Varian Semiconductor Equipment, University of Wisconsin-Madison, Department of Engineering Physics, Department of Physics and Astronomy, University of Iowa, Department of Electrical Engineering, Hanyang University, Seoul 133-791, South Korea, SPbGU, SPbU SES, WVU, Stanford University, Ruhr University Bochum, OSRAM AG, Berlin, General Electric Reserach, Wigner Research Center for Physics, Budapest, West Virginia University, Morgantown, York Plasma Institute, Department of Physics, University of York, York, YO10 5DD, Centre for Plasma Physics, Queen's University Belfast, Belfast, BT7 1NN, GREMI/CNRS/Universit\'e d'Orleans, CNRS/Universit\'e d'Orleans, ZIK plasmatis @ INP Greifswald, Kwangwoon University, Drexel University, A.J. Drexel Plasma Institute, YCR Cancer Research Unit, Department of Biology, University of York, UK, York Plasma Institute, Department of Physics, University of York, UK, National Institute of Advanced Industrial Science and Technology, Japan, Sandia National Laboratories, ZIK plasmatis at the INP Greifswald e.V., Laboratoire de Physique des Gaz et des Plasmas (LPGP), CNRS \& Universit\'e Paris-Sud, Queens University Belfast, University of York, University of Michigan, Michigan State University
View abstract →

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