Effect of complex permeability of ferrite material to the plasma discharge in a large size ferrite inductively coupled plasma

For the investigation in effect of the complex permeability to the ferrite inductively coupled plasma (Ferrite ICP), three different types of the ferrite material were adopted. Although the strength of the inductive coupling with the plasma can be improved the higher permeability, the plasma density can be reduced by higher permeability when the antenna resistance is higher enough to offset positive effect of it.