Electron Energy Distribution function in a weakly magnetized expanding helicon plasma discharge
POSTER
Abstract
Helicon wave heating is well known to produce high-density plasma source for application in plasma thrusters, plasma processing and many more. Our previous study \textit{(B Ellingboe et al APS Gaseous Electronics Conference 2015, abstract {\#}KW2.005}) has shown observation of helicon wave in a weakly magnetized inductively coupled plasma source excited by m$=$0 antenna at 13.56 MHz. In this paper, we investigated the Electron Energy Distribution Function (EEDF) in the same setup by using an RF compensated Langmuir probe. The ac signal superimposition technique (second harmonic technique) is used to determine EEDF. The EEDF is measured for 5-100 mTorr gas pressure, 100 W -- 1.5 kW rf power and at different locations in the source chamber, boundary and diffusion chamber. This paper will discuss the change in the shape of EEDF for various heating mode transitions.
Authors
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Nishant Sirse
School of Physical Sciences and NCPST, Dublin City University, Dublin 9, Ireland, NCPST and School of Physical Sciences, Dublin City Univ, Dublin City University
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Cleo Harvey
Dublin City University
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Cezar Gaman
Dublin City University
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Bert Ellingboe
School of Physical Sciences and NCPST, Dublin City University, Dublin 9, Ireland, Dublin City University, NCPST and School of Physical Sciences, Dublin City Univ, Ireland