A self-consistent global model of surface wave discharges with cylindrical or co-axial structures: Ar or O2 fed with continuous or pulse-modulated power input
ORAL
Abstract
A series of cylindrical and co-axial surface wave discharges fed with either argon or oxygen is modelled by a zero-dimensional global modelling approach. Compared to a recent study of the cylindrical surface-wave discharges (Kemaneci et al 2015 J. Phys. D: Appl. Phys. 48 435203), a self-consistent estimation of the edge-to-center ratios are analytically defined and extended to include the co-axial structures. The simulation results are compared with the experimental data of the considered discharges for continuous and pulse-modulated power input and a good agreement is obtained.
Authors
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Efe Kemaneci
Institute for Theoretical Electrical Engineering, Ruhr University Bochum
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Felix Mitschker
Institute for Electrical Engineering and Plasma Technology, Ruhr University Bochum
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Marcel Rudolph
Institute for Electrical Engineering and Plasma Technology, Ruhr University Bochum
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Daniel Szeremley
Institute for Theoretical Electrical Engineering, Ruhr University Bochum
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Denis Eremin
Institute for Theoretical Electrical Engineering, Ruhr University Bochum
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Peter Awakowicz
Institute for Electrical Engineering and Plasma Technology, Ruhr University Bochum
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Ralf Peter Brinkmann
Institute for Theoretical Electrical Engineering, Ruhr University Bochum