Simulation of a pulse-modulated radio-frequency atmospheric pressure glow discharge in Argon-Oxygen mixture

The pulse-modulate radio-frequency atmospheric pressure glow discharges (RF- APGDs ) plasmas can achieve low temperature RF APGDs with reduced power consumption. As a new discharge form, it has been investigated for applications in trials in cancer therapy, sterilization, air pollution control, etc . And it has been confirmed that ROS(Reactive oxygen species) play a key role in the processes. Thus, the characteristics of the ROS versus various discharge parameters may be a guidance for the industrial application. In this work, we use a fluid model to simulate the plasma characteristics for pulse-modulate RF-APGDs in argon-oxygen mixture. The influences of the duty cycle of pulse-modulated on the characteristics of discharge are studied. The evolution of electron density, electron energy and various reactive species versus oxygen admixture is discussed.