Modelling of capacitive coupled RF discharge in wide pressure range

A model of capacitive coupled RF discharge in argon at both atmospheriñ and low pressures between two parallel plate is described. Various approaches to simulate the RF discharge depending on pressure rates are used. A nonlocal approximation is used simulating the capacitive coupled RF discharge at low pressure. A local approximation considering both dimers and molecular ions is used for simulating the discharge at high pressure. Results are in agree with experimental data.