Simulation of low energy ion bombardment of alkane in low pressure RF plasmas

Results of molecular dynamics simulation of low energy (up to 100 eV) ion bombardment of both crystalline and amorphous alkanes in low pressure RF plasmas are described. An united-atom model of alkane chains where each site represents a CH2 group or a CH3 end group is used. The covalent bond between adjacent sites is modeled by a Dreiding potential. The interaction between the sites in different chains, as well as between argon and alkane sites is described by a LJ potential. A classical molecular dynamics code LAMMPS is used.