Micro-optomechanical trampoline resonators

Recently, micro-optomechanical devices have been proposed for implementation of experiments ranging from non-demolition measurements of phonon number to creation of macroscopic quantum superpositions. All have strenuous requirements on optical finesse, mechanical quality factor, and temperature. We present a set of devices composed of dielectric mirrors on Si$_{3}$N$_{4}$ trampoline resonators. We describe the fabrication process and present data on finesse and quality factor.