Enabling technologies for increased circuit complexity of high-coherence superconducting qubits: Part 2

ORAL

Abstract

As quantum computing with superconducting qubits increases in complexity, 3D integration will enable increased density of control and readout circuitry. One approach is to bond chips that perform different functionalities using indium bumps. MIT Lincoln Laboratory has integrated silicon hard-stop mesas to achieve reliable spacing and tilt between chips during bump bonding. Here we will describe further development of hard-stop mesas, assessment of tilt and integration into high-coherence superconducting qubit fabrication.

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Presenters

  • David Kim

    MIT Lincoln Laboratory, MIT Lincoln Lab, Lincoln Laboratory, Massachusetts Institute of Technology, Massachusetts Inst of Tech-MIT, Lincoln Laboratory, Massachusetts Inst of Tech-MIT

Authors

  • David Kim

    MIT Lincoln Laboratory, MIT Lincoln Lab, Lincoln Laboratory, Massachusetts Institute of Technology, Massachusetts Inst of Tech-MIT, Lincoln Laboratory, Massachusetts Inst of Tech-MIT

  • Jonilyn Yoder

    Massachusetts Institute of Technology, MIT Lincoln Laboratory

  • Rabindra Das

    MIT Lincoln Laboratory, MIT Lincoln Lab, Massachusetts Inst of Tech-MIT

  • Danna Rosenberg

    MIT Lincoln Laboratory, MIT Lincoln Lab, Massachusetts Inst of Tech-MIT, Lincoln Laboratory, Massachusetts Inst of Tech-MIT

  • Peter Baldo

    MIT Lincoln Laboratory

  • Gregory Calusine

    MIT Lincoln Laboratory

  • Michael Hellstrom

    MIT Lincoln Laboratory

  • Bethany Niedzielski

    MIT Lincoln Laboratory

  • Justin Mallek

    MIT Lincoln Lab, Massachusetts Inst of Tech-MIT, MIT Lincoln Laboratory

  • Alexander Melville

    MIT Lincoln Laboratory, MIT Lincoln Lab, Massachusetts Inst of Tech-MIT

  • Brenda Osadchy

    MIT Lincoln Laboratory

  • Donna-Ruth Yost

    MIT Lincoln Lab, Massachusetts Inst of Tech-MIT, MIT Lincoln Laboratory

  • Livia Racz

    MIT Lincoln Laboratory

  • William Oliver

    MIT Lincoln Laboratory, MIT Lincoln Lab, Massachusetts Institute of Technology & MIT Lincoln Laboratory, Department of Physics, Research Laboratory of Electronics, Lincoln Laboratory, Massachusetts Institute of Technology, Massachusetts Inst of Tech-MIT, Department of Physics, Research Laboratory of Electronics, Lincoln Laboratory, Massachusetts Inst of Tech-MIT, MIT, Lincoln Laboratory, Research Laboratory of Electronics, and Department of Physics, Massachusetts Institute of Technology, Department of Physics, Research Laboratory of Electronics, Lincoln Laboratory, Massachusetts institute of Technology