Increasing reliability for 3D integrated high-coherence superconducting qubits

ORAL

Abstract

As designs for superconducting qubits become more complex, 3D integration of two or more vertically bonded chips can enable increased density and connectivity. Precise control of the spacing between these chips is required to give designers accurate parameters to plan and predict circuit performance. In this talk, we will describe our process for using silicon hard-stop mesas to control chip spacing and tilt, and our integration of these features with our high-coherence superconducting qubit fabrication process.

–

Presenters

  • Bethany M Niedzielski

    Michigan State University, MIT Lincoln Laboratory, Lincoln Laboratory, Massachusetts Institute of Technology, MIT Lincoln Lab, Department of Physics, Massachusetts Institute of Technology, MIT Lincoln Laboratory, Massachusetts Institute of Technology

Authors

  • Bethany M Niedzielski

    Michigan State University, MIT Lincoln Laboratory, Lincoln Laboratory, Massachusetts Institute of Technology, MIT Lincoln Lab, Department of Physics, Massachusetts Institute of Technology, MIT Lincoln Laboratory, Massachusetts Institute of Technology

  • David K Kim

    MIT Lincoln Lab, Lincoln Laboratory, Massachusetts Institute of Technology, MIT Lincoln Laboratory, Massachusetts Institute of Technology, Massachusetts Institute of Technology Lincoln Laboratory, Lincoln Lab, Massachusetts Institute of Technology, USA, MIT Lincoln Laboratory, Massachusetts Institute of Technology

  • Jonilyn L Yoder

    MIT Lincoln Lab, Lincoln Laboratory, Massachusetts Institute of Technology, MIT Lincoln Laboratory, Massachusetts Institute of Technology, Massachusetts Institute of Technology Lincoln Laboratory, Lincoln Lab, Massachusetts Institute of Technology, USA, MIT Lincoln Laboratory, 244 Wood Street, Lexington, MA 02421, MIT Lincoln Laboratory, Massachusetts Institute of Technology

  • Danna Rosenberg

    MIT Lincoln Laboratory, Massachusetts Institute of Technology

  • Mollie E. Schwartz

    MIT Lincoln Laboratory, Massachusetts Institute of Technology

  • Rabindra Das

    MIT Lincoln Laboratory

  • Alexander Melville

    MIT Lincoln Lab, MIT Lincoln Laboratory, Massachusetts Institute of Technology, Lincoln Laboratory, Massachusetts Institute of Technology, MIT Lincoln Laboratory, 244 Wood Street, Lexington, MA 02421, MIT Lincoln Laboratory, Massachusetts Institute of Technology

  • Donna-Ruth Yost

    MIT Lincoln Laboratory, Massachusetts Institute of Technology

  • Justin Mallek

    MIT Lincoln Laboratory, Massachusetts Institute of Technology

  • Alexandra L Day

    MIT Lincoln Laboratory, Massachusetts Institute of Technology

  • Steven Weber

    MIT Lincoln Laboratory, Lincoln Laboratory, Massachusetts Institute of Technology

  • Cyrus F. Hirjibehedin

    MIT Lincoln Laboratory, London Centre for Nanotechnology, University College London

  • William D Oliver

    Research Laboratory of Electronics, Massachusetts Institute of Technology, Department of Physics, Research Laboratory of Electronics, Lincoln Laboratory, Massachusetts Institute of Technology, MIT Lincoln Lab, MIT Lincoln Laboratory, Department of Physics, Massachusetts Institute of Technology, MIT Lincoln Laboratory, Massachusetts Institute of Technology, Research Laboratory of Electronics, Physics, Lincoln Laboratory, Massachusetts Institute of Technology, Department of Physics, Massachusetts Institute of Technology, Research Laboratory of Electronics, Massachusetts Institute of Technology, MIT Lincoln Laboratory, Physics, Massachusetts Institute of Technology, Dept. of Physics, Research Laboratory of Electronics, and Lincoln Lab, Massachusetts Institute of Technology, USA, Research Laboratory of Electronics, Department of Physics, Massachusetts Institute of Technology, Cambridge, MA 02139, MIT Lincoln Laboratory, 244 Wood Street, Lexington, MA, Massachusetts Institute of Technology and MIT Lincoln Laboratory, Research Laboratory of Electronics, MIT Lincoln Laboratory, Department of Physics, Massachusetts Institute of Technology, Department of Physics, Research Laboratory of Electronics, MIT Lincoln Laboratory, Massachusetts Institute of Technology, Department of Physics, MIT; Research Laboratory of Electronics, MIT; MIT Lincoln Laboratory