Optimizing dielectric losses in a flip-chip architecture through silicon micromachining

To meet the coherence and open-design-space requirements of quantum information processing systems, we propose a compact, lumped-element superconducting circuit architecture capable of achieving high quality factor resonators employing vacuum-gap capacitors made possible by flip-chip manufacturing. Through silicon micromachining, we control the effective flip-chip gap, changing the field distribution of resonance modes. Guided by the participation ratio model, we further balance the contributions between known loss mechanisms to design high-coherence resonators, transmons, and quantum memories. This talk covers preliminary results and our process for realizing this architecture and future scaled-up iterations.