On-chip Integration of Lumped-element Purcell Filters with Transmon Qubits

Purcell filters, typically implemented with distributed elements, require large footprints that limit their placement on-chip with qubits. We have developed compact lumped-element Purcell filters integrated directly with transmon qubits on the same chip using a modified trilayer process. In this work, we present the design, fabrication, and measurements of these integrated filters and qubits, demonstrating their potential for scalable, high-performance quantum systems.