Superconducting Qubit Fabrication: New Methods

Presentations

• On-chip integration of superconducting qubits with a multilayer fabrication platform for filters and Josephson amplifiers

  ORAL

  March 17, 2026, 8:00 AM – March 17, 2026, 8:12 AM

  Presenters

  • Katarina Cicak

    • National Institute of Standards and Technology Boulder
    • National Institute of Standards and Technology
    • National Institute of Standards and Technology (NIST)

  Authors

  • Katarina Cicak

    • National Institute of Standards and Technology Boulder
    • National Institute of Standards and Technology
    • National Institute of Standards and Technology (NIST)

  • Kristen L Genter

    • University of Colorado Boulder, National Institute of Standards and Technology
    • University of Colorado, Boulder
    • University of Colorado Boulder, National Institute of Standards and Technology Boulder

  • Kaixuan Ji

    • University of Colorado Boulder, National Institute of Standards and Technology
    • University of Colorado Boulder, National Institute of Standards and Technology Boulder

  • Tony McFadden

    • National Institute of Standards and Technology Boulder
    • National Institute of Standards and Technology
    • National Institute of Standards and Technology, Boulder CO 80305
    • National Institute of Standards and Technology, Boulder, Colorado 80305, USA
    • National Institute of Standards and Technology (NIST)
    • University of California, Santa Barbara
    • National Institute of Standards and Technology, Boulder

  • Trevyn F.Q. F Larson

    • National Institute of Standards and Technology Boulder
    • National Institute of Standards and Technology
    • University of Colorado
    • University of Colorado Boulder, National Institute of Standards and Technology
    • University of Colorado Boulder, National Institute of Standards and Technology Boulder

  • Zachary Parrott

    • University of Colorado Boulder, National Institute of Standards and Technology
    • National Institute of Standards and Technology, Boulder, Colorado 80305, USA
    • University of Colorado, Boulder
    • University of Colorado Boulder
    • University of Colorado Boulder, National Institute of Standards and Technology Boulder
    • NIST, Boulder

  • Akash V Dixit

    • National Institute of Standards and Technology Boulder
    • National Institute of Standards and Technology

  • Florent Lecocq

    • National Institute of Standards and Technology, University of Colorado Boulder
    • National Institute of Standards and Technology
    • National Institute of Standards and Technology Boulder
    • National Institute of Standards and Technology, Boulder, Colorado 80305, USA
    • National Institute of Standards and Technology Boulder, University of Colorado Boulder

  • John D Teufel

    • National Institute of Standards and Technology, University of Colorado Boulder
    • National Institute of Standards and Technology Boulder

  • Jose A Aumentado

    • National Institute of Standards and Technology, University of Colorado Boulder
    • National Institute of Standards and Technology Boulder

  • Ray W Simmonds

    • National Institute of Standards and Technology, University of Colorado Boulder
    • National Institute of Standards and Technology
    • National Institute of Standards and Technology Boulder
    • The Global Coherence Project

  View abstract →

• On-chip Integration of Lumped-element Purcell Filters with Transmon Qubits

  ORAL

  March 17, 2026, 8:12 AM – March 17, 2026, 8:24 AM

  Presenters

  • Kaixuan Ji

    • University of Colorado Boulder, National Institute of Standards and Technology
    • University of Colorado Boulder, National Institute of Standards and Technology Boulder

  Authors

  • Kaixuan Ji

    • University of Colorado Boulder, National Institute of Standards and Technology
    • University of Colorado Boulder, National Institute of Standards and Technology Boulder

  • Zachary Parrott

    • University of Colorado Boulder, National Institute of Standards and Technology
    • National Institute of Standards and Technology, Boulder, Colorado 80305, USA
    • University of Colorado, Boulder
    • University of Colorado Boulder
    • University of Colorado Boulder, National Institute of Standards and Technology Boulder
    • NIST, Boulder

  • José A Estrada

    • University of Colorado, Boulder

  • Kristen L Genter

    • University of Colorado Boulder, National Institute of Standards and Technology
    • University of Colorado, Boulder
    • University of Colorado Boulder, National Institute of Standards and Technology Boulder

  • Akash V Dixit

    • National Institute of Standards and Technology Boulder
    • National Institute of Standards and Technology

  • Trevyn F.Q. F Larson

    • National Institute of Standards and Technology Boulder
    • National Institute of Standards and Technology
    • University of Colorado
    • University of Colorado Boulder, National Institute of Standards and Technology
    • University of Colorado Boulder, National Institute of Standards and Technology Boulder

  • Tony McFadden

    • National Institute of Standards and Technology Boulder
    • National Institute of Standards and Technology
    • National Institute of Standards and Technology, Boulder CO 80305
    • National Institute of Standards and Technology, Boulder, Colorado 80305, USA
    • National Institute of Standards and Technology (NIST)
    • University of California, Santa Barbara
    • National Institute of Standards and Technology, Boulder

  • Katarina Cicak

    • National Institute of Standards and Technology Boulder
    • National Institute of Standards and Technology
    • National Institute of Standards and Technology (NIST)

  • Ray W Simmonds

    • National Institute of Standards and Technology, University of Colorado Boulder
    • National Institute of Standards and Technology
    • National Institute of Standards and Technology Boulder
    • The Global Coherence Project

  View abstract →

• Abstract Withdrawn

  ORAL · Invited · Withdrawn

  March 17, 2026, 8:24 AM – March 17, 2026, 9:00 AM

  View abstract →

• Resist-free Josephson junction fabrication

  ORAL

  March 17, 2026, 9:00 AM – March 17, 2026, 9:12 AM

  Presenters

  • Tathagata Banerjee

    • Cornell University

  Authors

  • Tathagata Banerjee

    • Cornell University

  • Luojia Zhang

    • Cornell University

  • Stephen D. Funni

    • Department of Materials Science and Engineering, Cornell University
    • Cornell University

  • Judy J Cha

    • Department of Materials Science and Engineering, Cornell University
    • Cornell University

  • Valla Fatemi

    • Cornell University

  View abstract →

• Process integration of Al trilayer Josephson junction thin films in scalable superconducting qubit fabricatio

  ORAL

  March 17, 2026, 9:12 AM – March 17, 2026, 9:24 AM

  Presenters

  • Yen-Chun Chen

    • Center for Critical Issues, Academia Sinica, Taiwan
    • Research Center for Critical Issues, Academia Sinica

  Authors

  • Yen-Chun Chen

    • Center for Critical Issues, Academia Sinica, Taiwan
    • Research Center for Critical Issues, Academia Sinica

  • Wei-Lun Peng

    • National Changhua University of Education
    • Graduate Institute of Photonics, National Changhua University of Education

  • Cen-Shawn Wu

    • Department of Physics, National Changhua University of Education
    • National Changhua University of Education

  • Chung-Ting Ke

    • Academia Sinica
    • Research Center for Critical Issues, Academia Sinica

  • Chii-Dong Chen

    • Research Center for Critical Issues, Academia Sinica
    • Research Center for Critical Issues
    • Academia Sinica

  View abstract →

• Resist-free fabrication of Josephson junctions using stencil lithography

  ORAL

  March 17, 2026, 9:24 AM – March 17, 2026, 9:36 AM

  Presenters

  • Kishore Kumar Thiyagarajan

    • Delft University of Technology

  Authors

  • Kishore Kumar Thiyagarajan

    • Delft University of Technology

  • Matvey Finkel

    • Delft University of Technology

  • Anand Kamlapure

    • Delft University of Technology

  • Leonardo DiCarlo

    • Delft University of Technology
    • QuTech and Kavli Institute of Nanoscience, Delft University of Technology, The Netherlands

  View abstract →

• Sapphire Substrate Trenching to Advance Superconducting High-Coherence Quantum Devices

  ORAL

  March 17, 2026, 9:36 AM – March 17, 2026, 9:48 AM

  Presenters

  • Sabrina Garattoni

    • Fermilab
    • Fermi National Accelerator Laboratory (Fermilab)
    • Fermi National Accelerator Laboratory (FNAL)
    • Fermi National Accelerator Laboratory

  Authors

  • Sabrina Garattoni

    • Fermilab
    • Fermi National Accelerator Laboratory (Fermilab)
    • Fermi National Accelerator Laboratory (FNAL)
    • Fermi National Accelerator Laboratory

  • Mustafa Bal

    • Fermi National Accelerator Laboratory
    • Xanadu

  • Francesco Crisa

    • Fermi National Accelerator Laboratory
    • Fermi National Accelerator Laboratory (Fermilab)
    • Fermi National Accelerator Laboratory (FNAL)
    • Fermilab

  • Akshay A Murthy

    • Fermi National Accelerator Laboratory (Fermilab)

  • Jaeyel Lee

    • Fermi National Accelerator Laboratory
    • Fermilab

  • Adam C Clairmont

    • Fermilab

  • Zuhawn Sung

    • Fermi National Accelerator Laboratory (FNAL)

  • Ivan Nekrashevich

    • Fermi National Accelerator Laboratory (Fermilab)

  • Jasmine Panthee

    • Northwestern University

  • Shaojiang Zhu

    • Fermi National Accelerator Laboratory (Fermilab)

  • Alexander Romanenko

    • Fermi National Accelerator Laboratory (Fermilab)

  • Anna Grassellino

    • Fermi National Accelerator Laboratory (Fermilab)
    • Fermi National Accelerator Laboratory, Batavia, Illinois, 60510, USA

  View abstract →

• Reducing TLS loss in tantalum resonators using titanium sacrificial layers

  ORAL

  March 17, 2026, 9:48 AM – March 17, 2026, 10:00 AM

  Publication: Planned paper: Reducing TLS loss in tantalum resonators using titanium sacrificial layers

  Presenters

  • Zachary Degnan

    • University of Queensland

  Authors

  • Zachary Degnan

    • University of Queensland

  • Chun-Ching Chiu

    • University of Queensland

  • Yi-Hsun Chen

    • University of Queensland

  • Leonid Abdurakhimov

    • IQM Quantum Computers

  • Lihuang Zhu

    • IQM Quantum Computers

  • Arkady Fedorov

    • University of Queensland

  • Peter A Jacobson

    • University of Queensland

  View abstract →

• Surface Engineering of Superconducting Coplanar Waveguide Resonators via Integrated Atomic Layer Etching and Deposition

  ORAL

  March 17, 2026, 10:00 AM – March 17, 2026, 10:12 AM

  Presenters

  • Lan-Hsuan Lee

    • National Tsing Hua University

  Authors

  • Lan-Hsuan Lee

    • National Tsing Hua University

  • Wei-Jie Yan

    • National Tsing Hua University

  • Tzu-Pu Hung

    • National Center for Instrumentation Research

  • Mikko Möttönen

    • QCD Labs, Department of Applied Physics, Aalto University
    • Aalto University

  • Yen-Hsiang Lin

    • Tsinghua University
    • National Tsinghua University
    • National Tsing Hua University

  View abstract →

• Disentangling Bulk from Surface Loss in 2D Superconducting Archimedean Spiral Resonators 

  ORAL

  March 17, 2026, 10:12 AM – March 17, 2026, 10:24 AM

  Presenters

  • Benjamin Robert Freiman

    • MIT Lincoln Laboratory

  Authors

  • Benjamin Robert Freiman

    • MIT Lincoln Laboratory

  • Thomas M Hazard

    • MIT Lincoln Laboratory

  • Kevin A Grossklaus

    • MIT Lincoln Laboratory

  • Maya M Amouzegar

    • Johns Hopkins University Applied Physics Laboratory

  • James Schackford

    • Johns Hopkins University Applied Physics Laboratory

  • Alec L Emser

    • MIT Lincoln Laboratory

  • Basil M Smitham

    • MIT Lincoln Laboratory

  • Felipe Contipelli

    • MIT Lincoln Laboratory

  • Neda Forouzani

    • Johns Hopkins University Applied Physics Laboratory

  • Tauno Palomaki

    • Johns Hopkins University Applied Physics Laboratory

  • John Cummings

    • MIT Lincoln Laboratory

  • Michael A Gingras

    • MIT Lincoln Laboratory

  • Bethany M Niedzielski

    • MIT Lincoln Laboratory

  • Mallika T Randeria

    • MIT Lincoln Laboratory

  • Lila Rodgers

    • MIT Lincoln Laboratory

  • Meghan Schuldt

    • MIT Lincoln Laboratory

  • Mollie E. Schwartz

    • MIT Lincoln Laboratory

  • Kyle Serniak

    • MIT Lincoln Laboratory

  View abstract →

• Realizing low-loss, compact microwave-frequency resonators with spiral inductors

  ORAL

  March 17, 2026, 10:24 AM – March 17, 2026, 10:36 AM

  Presenters

  • Murali Krishna Kurmapu

    • Friedrich-Alexander University Erlangen-Nuremberg

  Authors

  • Murali Krishna Kurmapu

    • Friedrich-Alexander University Erlangen-Nuremberg

  • Prakiran Baidya

    • Friedrich-Alexander-University Erlangen-Nuremberg
    • Friedrich-Alexander University Erlangen-Nuremberg (FAU), Erlangen, Germany
    • Friedrich-Alexander University Erlangen-Nürnberg
    • Friedrich-Alexander University Erlangen-Nuremberg

  • Victor Kemme

    • Friedrich-Alexander University Erlangen-Nuremberg (FAU), Erlangen, Germany
    • Friedrich-Alexander University Erlangen-Nürnberg
    • Friedrich-Alexander University Erlangen-Nuremberg

  • Thomas Foesel

    • Friedrich-Alexander University Erlangen-Nuremberg (FAU), Erlangen, Germany
    • Friedrich-Alexander University Erlangen-Nürnberg
    • Friedrich-Alexander University Erlangen-Nuremberg

  • Markus Sondermann

    • Friedrich-Alexander-University Erlangen-Nuremberg
    • Friedrich-Alexander University Erlangen-Nuremberg (FAU), Erlangen, Germany
    • Friedrich-Alexander University Erlangen-Nürnberg
    • Friedrich-Alexander University Erlangen-Nuremberg

  • Christopher Eichler

    • Friedrich-Alexander University Erlangen-Nuremberg
    • Friedrich-Alexander University Erlangen-Nuremberg (FAU), Erlangen, Germany

  View abstract →

• Modern Semiconductor Material Engineering for Quantum Technology

  ORAL

  March 17, 2026, 10:36 AM – March 17, 2026, 10:48 AM

  Presenters

  • Sameer Sonar

    • Caltech

  Authors

  • Ruoyu Li

    • Applied Materials, Inc.

  • Sameer Sonar

    • Caltech

  View abstract →