Superconducting Qubit Fabrication: Wiring and Vacuum Structures

Presentations

• Through-Silicon Vias (TSVs) for High-Coherence Superconducting Qubit Devices

  ORAL

  March 16, 2026, 3:30 PM – March 16, 2026, 3:42 PM

  Presenters

  • Gabriel Cutter

    • Massachusetts Institute of Technology

  Authors

  • Gabriel Cutter

    • Massachusetts Institute of Technology

  • Farid Hassani Bijarbooneh

    • Massachusetts Institute of Technology

  • Aranya Goswami

    • Massachusetts Institute of Technology
    • Nokia Bell Labs

  • Jeffrey A Grover

    • Massachusetts Institute of Technology

  • William D Oliver

    • Massachusetts Institute of Technology

  View abstract →

• Superconducting Through-Silicon Vias for Cryogenic Interposers using 300mm Wafer Processes 

  ORAL

  March 16, 2026, 3:42 PM – March 16, 2026, 3:54 PM

  Presenters

  • A. M. Vadiraj

    • imec

  Authors

  • A. M. Vadiraj

    • imec

  • Qian Yang

    • imec

  • Anish Dangol

    • imec

  • Jaber Derakhshandeh

    • imec

  • Rohith Acharya

    • IMEC
    • imec

  • Tsvetan Ivanov

    • IMEC
    • imec

  • Anton Potocnik

    • IMEC
    • imec

  • Massimo Mongillo

    • IMEC
    • Imec
    • imec

  • Shana Massar

    • IMEC
    • imec

  • Daniel Perez Lozano

    • IMEC
    • imec

  • Yann Canvel

    • IMEC
    • imec

  • Anne Jourdain

    • imec

  • Andy Miller

    • imec

  • Danny Wan

    • IMEC
    • Imec
    • imec

  • Kristiaan De Greve

    • Imec
    • KU Leuven, imec
    • IMEC
    • imec

  View abstract →

• Differential indium bonding for high-coherence 3D-integrated superconducting qubits

  ORAL

  March 16, 2026, 3:54 PM – March 16, 2026, 4:06 PM

  Presenters

  • Lea Richard

    • Walther Meissner Institut
    • TU Munich
    • Walther-Meissner-Institute
    • Walther-Meißner-Institut

  Authors

  • Lea Richard

    • Walther Meissner Institut
    • TU Munich
    • Walther-Meissner-Institute
    • Walther-Meißner-Institut

  • Niklas Bruckmoser

    • Walther-Meißner-Institute
    • TU Munich & Walther-Meissner-Institute
    • Walther-Meissner-Institute
    • Walther-Meißner-Institut
    • Walther Meissner Institute & TU Munich

  • Leon Koch

    • TU Munich
    • TU Munich & Walther-Meissner-Institute
    • Walther-Meissner-Institute
    • TU Munich & Walther-Meißner-Institut
    • Walther-Meißner-Institut
    • Walther Meissner Institute & TU Munich

  • Julius Feigl

    • Walther-Meissner-Insitute
    • Walther-Meissner-Institut
    • Walther-Meissner-Institute
    • TU Munich & Walther-Meißner-Institut
    • Walther-Meißner-Institut
    • Walther Meissner Institute & TU Munich

  • David C Bunch

    • Walther-Meißner-Institut
    • Walther-Meissner-Institute

  • Ivan Tsitsilin

    • Technical University Munich (TUM), Walther Meißner Institute (WMI)
    • TU Munich
    • TU Munich & Walther-Meissner-Institute
    • Walther-Meissner-Institute
    • Walther-Meißner-Institut
    • Walther Meissner Institute & TU Munich

  • Johannes Schirk

    • Walther-Meißner-Institute
    • TU Munich & Walther-Meissner-Institute
    • Walther-Meißner-Institut

  • Anirban Bhattacharjee

    • Walther-Meißner-Institut

  • Vera Bader

    • Walther-Meissner-Institut
    • Walther-Meissner-Institute
    • Walther-Meißner-Institut

  • Haiyang Hu

    • Walther-Meissner-Institute
    • Walther-Meißner-Institut

  • Christian M Schneider

    • Technical University Munich (TUM), Walther Meißner Institute (WMI)
    • TU Munich
    • Walther Meissner Institute
    • TU Munich & Walther-Meissner-Institute
    • TU Munich & Walther-Meißner-Institut
    • Walther-Meißner-Institut
    • Walther Meissner Institute & TU Munich

  • Lasse Södergren

    • Walther-Meissner-Institute
    • Walther-Meissner-Institut
    • Walther-Meißner-Institut
    • Walther Meissner Institute & TU Munich

  • Stefan Filipp

    • Walther-Meißner-Institute
    • TU Munich
    • TU Munich & Walther-Meissner-Institute
    • Walther-Meissner-Institute
    • Walther-Meißner-Institut & TU Munich
    • TU Munich & Walther-Meißner-Institut
    • Walther Meissner Institute & TU Munich

  View abstract →

• Losses of flipchip transmon and co-planar waveguide resonator

  ORAL

  March 16, 2026, 4:06 PM – March 16, 2026, 4:18 PM

  Presenters

  • Yen-An Shih

    • Delft University of Technology

  Authors

  • Yen-An Shih

    • Delft University of Technology

  • Siddharth Singh

    • Delft University of Technology

  • Dhananjay Joshi

    • Delft University of Technology

  • Rebecca Gharibaan

    • Delft University of Technology

  • Nataliia Zhurbina

    • Delft University of Technology

  • Barka Khan

    • Delft University of Technology

  • Lukas Johannes J Splitthoff

    • Delft University of Technology
    • Chalmers University of Technology

  • Srijit Goswami

    • Delft University of Technology

  • Christian Kraglund Andersen

    • Delft University of Technology

  View abstract →

• Flip-Chip Architecture with Metallized Silicon Posts for Superconducting Qubit Integration

  ORAL

  March 16, 2026, 4:18 PM – March 16, 2026, 4:30 PM

  Presenters

  • Farid Hassani Bijarbooneh

    • Massachusetts Institute of Technology

  Authors

  • Farid Hassani Bijarbooneh

    • Massachusetts Institute of Technology

  • Aranya Goswami

    • Massachusetts Institute of Technology
    • Nokia Bell Labs

  • Gabriel Cutter

    • Massachusetts Institute of Technology

  • Alexander Rommens

    • Massachusetts Institute of Technology

  • Jeffrey A Grover

    • Massachusetts Institute of Technology

  • William D Oliver

    • Massachusetts Institute of Technology

  View abstract →

• Predicting and measuring device quality in a micromachined flip-chip architecture

  ORAL

  March 16, 2026, 4:30 PM – March 16, 2026, 4:42 PM

  Presenters

  • Nico Zani

    • Yale University

  Authors

  • Nico Zani

    • Yale University

  • Yanhao Wang

    • Yale University

  • Heekun Nho

    • Yale University

  • Julia Berndtsson

    • Google Quantum AI

  • Alexander P Read

    • Yale University

  • Luigi Frunzio

    • Yale University

  • Robert J Schoelkopf

    • Yale University

  View abstract →

• Fabrication of Metal Air Bridges for Superconducting Circuits using Two-Photon Lithography

  ORAL

  March 16, 2026, 4:42 PM – March 16, 2026, 4:54 PM

  Publication: Yi-Hsiang Huang, Haozhi Wang, Zhuo Shen, Austin Thomas, C. J. K. Richardson, and B. S. Palmer, Applied Physics Letters 127 044002 (2025).

  Presenters

  • Benjamin Palmer

    • Laboratory for Physical Sciences (LPS)

  Authors

  • Benjamin Palmer

    • Laboratory for Physical Sciences (LPS)

  View abstract →

• Compact qubits on thin membrane for large-scale quantum computing architectures

  ORAL

  March 16, 2026, 4:54 PM – March 16, 2026, 5:06 PM

  Publication: Patent application number 63/844,903

  Presenters

  • Ivan Nekrashevich

    • Fermi National Accelerator Laboratory (Fermilab)

  Authors

  • Ivan Nekrashevich

    • Fermi National Accelerator Laboratory (Fermilab)

  • Tanay Roy

    • Fermi National Accelerator Laboratory (Fermilab)

  • Vyacheslav P Yakovlev

    • Fermi National Accelerator Laboratory (Fermilab)

  • Anna Grassellino

    • Fermi National Accelerator Laboratory (Fermilab)
    • Fermi National Accelerator Laboratory, Batavia, Illinois, 60510, USA

  View abstract →

• Engineering Phonon Isolation in SOI Superconducting Qubits for Radiation-Resilient Quantum Hardware.

  ORAL

  March 16, 2026, 5:06 PM – March 16, 2026, 5:18 PM

  Presenters

  • Divita Gautam

    • University of Queensland

  Authors

  • Divita Gautam

    • University of Queensland

  • Leo V Sementilli

    • University of California, Berkeley
    • University of California, Berkeley and Lawrence Berkeley National Laboratory

  • Aditya Aditya

    • University of Queensland

  • Xin He

    • University of Queensland

  • Warwick Bowen

    • University of Queensland

  • Arkady Fedorov

    • University of Queensland

  View abstract →

• Towards phononic shielding of superconducting qubits

  ORAL

  March 16, 2026, 5:18 PM – March 16, 2026, 5:30 PM

  Presenters

  • Marco Scigliuzzo

    • Ecole Polytechnique Federale de Lausanne
    • Ecole Polytechnique Federale de Lausanne (EPFL)

  Authors

  • Marco Scigliuzzo

    • Ecole Polytechnique Federale de Lausanne
    • Ecole Polytechnique Federale de Lausanne (EPFL)

  • Xuxin Wang

    • Federal Institute of Technology (EPFL)
    • Swiss Federal Institute of Technology Lausanne (EPFL)
    • Ecole Polytechnique Federale de Lausanne (EPFL)

  • Evgenii Guzovskii

    • Ecole Polytechnique Federale de Lausanne
    • EPFL
    • Ecole Polytechnique Federale de Lausanne (EPFL)

  • Guillermo Arregui

    • Ecole Polytechnique Federale de Lausanne (EPFL)

  • Marcus Albrechtsen

    • Ecole Polytechnique Federale de Lausanne (EPFL)

  • Hao Li

    • Federal Institute of Technology (EPFL)
    • EPFL
    • Ecole Polytechnique Federale de Lausanne (EPFL)

  • Jiachen Cai

    • EPFL
    • Ecole Polytechnique Federale de Lausanne (EPFL)

  • Shingo Kono

    • Federal Institute of Technology (EPFL)
    • Ecole Polytechnique Federale de Lausanne
    • École Polytechnique Fédérale de Lausanne
    • Swiss Federal Institute of Technology Lausanne (EPFL)
    • Ecole Polytechnique Federale de Lausanne (EPFL)

  • Xin Ou

    • Chinese Academy of Science
    • Chinese Academy of Sciences

  • Tobias J. Kippenberg

    • EPFL, Switzerland
    • Federal Institute of Technology (EPFL)
    • Ecole Polytechnique Federale de Lausanne
    • EPFL
    • Swiss Federal Institute of Technology Lausanne (EPFL)
    • Ecole Polytechnique Federale de Lausanne (EPFL)

  View abstract →

• Suppressing interface piezoelectric losses in superconducting qubits

  ORAL

  March 16, 2026, 5:30 PM – March 16, 2026, 5:42 PM

  Presenters

  • Sanjit Shirol

    • University of California, Berkeley

  Authors

  • Sanjit Shirol

    • University of California, Berkeley

  • Haoxin Zhou

    • University of California, Berkeley
    • University of California, Berkeley and Lawrence Berkeley National Laboratory

  • Alp Sipahigil

    • University of California, Berkeley
    • University of California, Berkeley and Lawrence Berkeley National Laboratory

  View abstract →

• Observation of Interface-Piezoelectric Loss in Transmon Qubits on Silicon

  ORAL

  March 16, 2026, 5:42 PM – March 16, 2026, 5:54 PM

  Presenters

  • Haoxin Zhou

    • University of California, Berkeley
    • University of California, Berkeley and Lawrence Berkeley National Laboratory

  Authors

  • Haoxin Zhou

    • University of California, Berkeley
    • University of California, Berkeley and Lawrence Berkeley National Laboratory

  • Kangdi Yu

    • University of California, Berkeley

  • Yashwanth Balaji

    • Lawrence Berkeley National Laboratory

  • Leo V Sementilli

    • University of California, Berkeley
    • University of California, Berkeley and Lawrence Berkeley National Laboratory

  • Zi-Huai Zhang

    • University of California, Berkeley
    • University of California, Berkeley and Lawrence Berkeley National Laboratory
    • Princeton University

  • Adam Schwartzberg

    • Angstrom Engineering Inc.
    • Lawrence Berkeley National Laboratory
    • Lawrence Berkeley National Lab

  • Alp Sipahigil

    • University of California, Berkeley
    • University of California, Berkeley and Lawrence Berkeley National Laboratory

  View abstract →

• Plasma-Mode Engineering in Fluxonium Qubits

  ORAL

  March 16, 2026, 5:54 PM – March 16, 2026, 6:06 PM

  Presenters

  • Shelender Kumar

    • Institut Néel
    • Institut Neel, CNRS, 38042 Grenoble, France
    • Univ. Grenoble Alpes, CNRS, Grenoble INP, Institut Néel

  Authors

  • Shelender Kumar

    • Institut Néel
    • Institut Neel, CNRS, 38042 Grenoble, France
    • Univ. Grenoble Alpes, CNRS, Grenoble INP, Institut Néel

  • Waël Ardati

    • Univ. Grenoble Alpes, CNRS, Grenoble INP, Institut Néel
    • Institut Neel, CNRS, 38042 Grenoble, France

  • Dorian Nicolas

    • Université Grenoble Alpes, CNRS, Grenoble INP, Institut Néel
    • Institut Neel, CNRS, 38042 Grenoble, France

  • Francesca D'Esposito

    • Institut Neel, CNRS, 38042 Grenoble, France
    • Univ. Grenoble Alpes, CNRS, Grenoble INP, Institut Néel

  • Jean Samuel Tettekpoe

    • Institut Neel, CNRS, 38042 Grenoble, France
    • Univ. Grenoble Alpes, CNRS, Grenoble INP, Institut Néel

  • Vishnu Narayanan Suresh

    • Institut Néel
    • Univ. Grenoble Alpes, CNRS, Grenoble INP, Institut Néel
    • Institut Neel, CNRS, 38042 Grenoble, France

  • Lucas Ruela

    • Institut Néel
    • Néel
    • Institut Neel, CNRS, 38042 Grenoble, France

  • Olivier Buisson

    • CNRS & Universite Grenoble Alpes
    • Institut Neel, CNRS, 38042 Grenoble, France
    • Univ. Grenoble Alpes, CNRS, Grenoble INP, Institut Néel

  • Quentin Ficheux

    • University of Maryland, College Park
    • Université Grenoble Alpes, CNRS, Grenoble INP, Institut Néel
    • Univ. Grenoble Alpes, CNRS, Grenoble INP, Institut Néel
    • Institut Neel, CNRS, 38042 Grenoble, France

  • Nicolas Roch

    • Institut Neel
    • Univ. Grenoble Alpes, CNRS, Grenoble INP, Institut Néel, 38000 Grenoble, France and Silent Waves, 38000 Grenoble, France
    • Institut Neel, Silent Waves
    • Institut Neel, CNRS, 38042 Grenoble, France
    • Univ. Grenoble Alpes, CNRS, Grenoble INP, Institut Néel

  View abstract →